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Alternative TitleAsymmetric hysteresis calibration of AFM actuator based on keystone operator
王栋; 于鹏; 周磊; 刘柱; 董再励
Source Publication仪器仪表学报
Indexed ByEI ; CSCD
EI Accession number20151100627471
Contribution Rank1
Funding Organization国家自然科学基金青年基金(61304251); 国家863计划(2012AA041204); 中国科学院科研装备研制(YZ201245)资助项目
Keyword非对称pi模型 梯形算子 原子力显微镜 压电陶瓷 迟滞性前馈校正 逆模型直接辨识
Other AbstractPiezoelectric ( PZT) actuator is often used in atomic force microscope to realize nano-scale observation and manipulation. However,the intrinsic hysteresis non-linearity of PZT strongly affects observation quality and manipulation accuracy. Prandtl-Ishlinskii ( PI) model based feedforward controller can compensate the hysteresis non-linearity of PZT,but the conventional PI model cannot eliminate the effect of asymmetric hysteresis. Aiming to solve the problem,an asymmetric hysteresis model based on keystone operator is proposed. Parameters of inverse model are obtained through system identification method,and the feedforward calibration is implemented based on the inverse model. Experiment in AFM system shows that modeling errors caused by asymmetric hysteresis are effective reduced by the proposed hysteresis model,and imaging quality of the custom-built AFM is improved by feedforward hysteresis compensation based on the model.
Citation statistics
Cited Times:6[CSCD]   [CSCD Record]
Document Type期刊论文
Recommended Citation
GB/T 7714
王栋,于鹏,周磊,等. 基于梯形算子的AFM驱动器非对称迟滞性校正[J]. 仪器仪表学报,2015,36(1):32-39.
APA 王栋,于鹏,周磊,刘柱,&董再励.(2015).基于梯形算子的AFM驱动器非对称迟滞性校正.仪器仪表学报,36(1),32-39.
MLA 王栋,et al."基于梯形算子的AFM驱动器非对称迟滞性校正".仪器仪表学报 36.1(2015):32-39.
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