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Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model
Wang D(王栋); Yu P(于鹏); Wang FF(王飞飞); Chan, Ho-Yin; Zhou L(周磊); Dong ZL(董再励); Liu LQ(刘连庆); Li WJ(李文荣)
Department机器人学研究室
Source PublicationSensors (Switzerland)
ISSN1424-8220
2015
Volume15Issue:2Pages:3409-3425
Indexed BySCI ; EI
EI Accession number20150600505148
WOS IDWOS:000351992700006
Contribution Rank1
KeywordAtomic Force Microscope Hysteresis Piezoelectric Actuator Direct Inverse Asymmetric Pi Model Feedforward Control
AbstractA modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. © 2015 by the authors; licensee MDPI, Basel, Switzerland.
Language英语
WOS HeadingsScience & Technology ; Physical Sciences ; Technology
WOS SubjectChemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS KeywordPRANDTL-ISHLINSKII MODEL ; COMPENSATION ; FEEDFORWARD ; ACTUATORS ; CREEP
WOS Research AreaChemistry ; Electrochemistry ; Instruments & Instrumentation
Citation statistics
Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/15753
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆); Li WJ(李文荣)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
Recommended Citation
GB/T 7714
Wang D,Yu P,Wang FF,et al. Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model[J]. Sensors (Switzerland),2015,15(2):3409-3425.
APA Wang D.,Yu P.,Wang FF.,Chan, Ho-Yin.,Zhou L.,...&Li WJ.(2015).Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model.Sensors (Switzerland),15(2),3409-3425.
MLA Wang D,et al."Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model".Sensors (Switzerland) 15.2(2015):3409-3425.
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