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Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model
Wang D(王栋); Yu P(于鹏); Wang FF(王飞飞); Chan, Ho-Yin; Zhou L(周磊); Dong ZL(董再励); Liu LQ(刘连庆); Li WJ(李文荣)
作者部门机器人学研究室
关键词Atomic Force Microscope Hysteresis Piezoelectric Actuator Direct Inverse Asymmetric Pi Model Feedforward Control
发表期刊Sensors (Switzerland)
ISSN1424-8220
2015
卷号15期号:2页码:3409-3425
收录类别SCI ; EI
EI收录号20150600505148
WOS记录号WOS:000351992700006
产权排序1
摘要A modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. © 2015 by the authors; licensee MDPI, Basel, Switzerland.
语种英语
WOS标题词Science & Technology ; Physical Sciences ; Technology
WOS类目Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
关键词[WOS]PRANDTL-ISHLINSKII MODEL ; COMPENSATION ; FEEDFORWARD ; ACTUATORS ; CREEP
WOS研究方向Chemistry ; Electrochemistry ; Instruments & Instrumentation
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/15753
专题机器人学研究室
通讯作者Liu LQ(刘连庆); Li WJ(李文荣)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
推荐引用方式
GB/T 7714
Wang D,Yu P,Wang FF,et al. Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model[J]. Sensors (Switzerland),2015,15(2):3409-3425.
APA Wang D.,Yu P.,Wang FF.,Chan, Ho-Yin.,Zhou L.,...&Li WJ.(2015).Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model.Sensors (Switzerland),15(2),3409-3425.
MLA Wang D,et al."Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model".Sensors (Switzerland) 15.2(2015):3409-3425.
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