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专利名称: 半导体制造设备前端模块的传输控制平台化实现方法
其他题名: Method for realizing transmission control platformization of semiconductor manufacturing equipment front end module
作者: 于海斌; 徐皑冬; 张吉龙; 刘明哲; 胡静涛; 李正
所属部门: 工业控制网络与系统研究室
专利权人: 中国科学院沈阳自动化研究所
专利代理: 沈阳科苑专利商标代理有限公司 21002
专利国别: 中国
专利类型: 发明授权
专利状态: 有效
摘要: 本发明涉及一种半导体制造设备前端模块的传输控制平台化实现方法,步骤为:建立相应的子系统管理模块、通讯接口模块、解析模块和网络通讯模块;通讯接口模块接收到半导体制造设备控制系统发送的控制指令,转发给子系统管理模块;子系统管理模块对控制指令进行解析,分发给相应的子系统模块,子系统模块通过网络通讯模块向控制器发送指令,多个子系统模块可并行执行控制指令;解析模块对接收到的控制器消息进行解析,将指令运行结果反馈给相应的子系统模块,再由通讯接口模块反馈给半导体制造设备控制系统。本发明为半导体制造设备前端模块提供了标准化的软件接口,有利于不同IC装备控制系统标准化;提高了系统的生产效率,提高了系统的适应性。
英文摘要:

The invention relates to a method for realizing transmission control platformization of a semiconductor manufacturing equipment front end module, which comprises the steps that: a corresponding subsystem management module, a communication interface module, an analysis module and a network communication module are established the communication interface module receives a control command sent by a semiconductor manufacturing equipment control system and transfers the control command to the subsystem management module the subsystem management module analyzes the control command and distributes the analyzed control command to corresponding subsystem modules, and a plurality of subsystem modules send the command to a controller through the network communication module, and can execute the control command in parallel and the analysis module analyzes the received controller information, feeds back a command operation result to a corresponding subsystem module, and then feeds back the command operation result to the semiconductor manufacturing equipment control system through the communication interface module. A standardized software interface is provided for the semiconductor manufacturing equipment front end module, so that the standardization of different IC (integrated circuit) equipment control systems is favored, the production efficiency of the system is improved, and the adaptability of the system is improved.

是否PCT专利:
申请日期: 2010-12-30
公开日期: 2012-07-11
授权日期: 2015-06-10
专利申请号: CN201010616602.1
公布/公告号: CN102566527B
语种: 中文
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/15947
Appears in Collections:工业控制网络与系统研究室_专利

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