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题名: Optically-controlled digital electrodeposition of thin-film metals for fabrication of nano-devices
作者: Liu N(刘娜) ; Wei FN(魏发南) ; Liu LQ(刘连庆) ; Lai, Hok Sum Sam ; Yu HB(于海波) ; Wang YC(王越超) ; Lee, Gwo-Bin ; Li WR(李文荣)
作者部门: 机器人学研究室
刊名: OPTICAL MATERIALS EXPRESS
ISSN号: 2159-3930
出版日期: 2015
卷号: 5, 期号:4, 页码:838-848
收录类别: SCI ; EI
产权排序: 1
项目资助者: National Natural Science Foundation of China [61302003] ; NSFC/RGC Joint Research Scheme [5141101088] ; CAS-Croucher Funding Scheme for Joint Laboratories [9500011] ; CAS-FEA International Partnership Program for Creative Research Teams
摘要: Precise micro-scale patterning of metal thin-films with semiconductor materials is a critical step in the fabrication of any micro-devices. Conventional metal patterning methods such as photolithography, laser-induced direct printing techniques, and micro-contact printing methods all have different disadvantages such as high capital equipment cost and low throughput efficiency. In this article, an optically-controlled digital electrodeposition (ODE) method for direct patterning of metal thin-films on a semiconductor substrate has been demonstrated. This method allows for dynamic patterning of custom micro-scale silver structures with high conductivity of 2 x 10(7) S/m in large scale within 10 seconds and could reach a smallest line width of 2.7 mu m. The entire process is performed at room temperature and atmospheric pressure conditions, while requiring no photolithographic steps or metal nanoparticle inks. Utilizing this direct structural formation technique, a bottom-up protocol for rapidly assembling nanowire-based field-effect transistors has been demonstrated, which shows that this novel technique could potentially become an alternative, low-cost and flexible technology for fabricating integrated nano-devices. (C) 2015 Optical Society of America
语种: 英语
WOS记录号: WOS:000352293100019
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Materials Science, Multidisciplinary ; Optics
关键词[WOS]: FEMTOSECOND LASER ; AG NANOPARTICLES ; DEPOSITION ; COPPER ; STEP
研究领域[WOS]: Materials Science ; Optics
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内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/16231
Appears in Collections:机器人学研究室_期刊论文

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