SIA OpenIR  > 智能检测与装备研究室
Alternative TitleResearch on three dimensional micro force perception method for automated micro assembly system
Thesis Advisor杜劲松 ; 刘意杨
Keyword微装配 微接触力 Pvdf 3-d传感器 Sub-μn传感器
Call NumberTP212/M14/2015
Degree Discipline控制理论与控制工程
Degree Name硕士
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Other AbstractMicro Electric Mechanical System (MEMS) is developing quickly a new research field as an advanced technique in twenty-first Century. Micro assembly system is one of the most important key technologies in Micro Electro Mechanical System. In this area, there is no reliable 3-D sub micro force sensor. This research is supported by the national science foundation, “Research on Robots' 3D Micro Force Information Sensing and Intelligent Control Method Based on Infinite Dimensions System Method in Micro Assembly”, and the main research work is as follows. According to the comparison among the performance of various piezoelectric materials commonly used, PVDF is chosen as the sensitive element of micro force sensor which had excellent performance. Based on the established cantilever beam structure model of PVDF, we derive linear relationship between the charge generated on the PVDF surface and force acted on PVDF thin film. Because micro force sensor must have the ability to measure static force information, it is necessary to design the signal conditioning circuit. Meantime, we derive functional relationship between force and output voltage by signal conditioning the circuit. Combining with micro force sensor characteristics, we select an indirect calibration method which will be looking for standard displacement source to replace standard quality source. The calibration curve and theoretical curve is very close. Its resolution can reach 0.1 μN, and has good linearity. Based on independence between dimensions of 2-D sensor, 3-D sensor structure is designed and improved. The improved structure was rationality verified by FEA. In conclusion, the research result of this paper for 3-D sub-μN sensor not only provides a correct and effective 3-D sensor structure, but also a feasible method for micro manufacture and micro assembly.
Contribution Rank1
Document Type学位论文
Recommended Citation
GB/T 7714
马超哲. 面向自动化微装配系统的三维微力信息感知方法研究[D]. 沈阳. 中国科学院沈阳自动化研究所,2015.
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