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扫描探针显微镜研制中的若干关键技术研究
Alternative TitleStudy of the Key Technologies in Scanning Probe Microscope Development
王栋1,2
Department机器人学研究室
Thesis Advisor李文荣 ; 董再励
ClassificationTB383
Keyword扫描探针显微镜 原子力显微镜 关键技术 迟滞前馈校正 幅值检测
Call NumberTB383/W31/2015
Pages113页
Degree Discipline机械电子工程
Degree Name博士
2015-05-27
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Abstract纳米尺度的观测与操控能力是纳米科学技术发展的基本动力,以原子力显微镜(AFM)为代表的扫描探针技术是纳米尺度观测与操控领域的一种重要手段。AFM是一种光机电集成系统,由于面向超高分辨率观测需求,其系统构成的各部分如高精度扫描机构、高分辨率光电检测、高信噪比信号处理和多路高精度控制等技术模块的设计和集成对系统实现至关重要。所采用的信号处理方法、控制方法、成像方法对系统性能的实现也具有决定性作用。目前,我国扫描探针技术还相对薄弱。因而,发展自主扫描探针系统技术对提升我国高端装备技术水平,促进我国纳米科学技术的发展具有重要意义。本论文研究以国家自然科学基金项目(61304251)和国家863计划(2012AA041204)为依托,在系统研究了AFM原理基础上,重点针对扫描探针显微镜研制中的若干关键技术展开研究。1、系统分析了扫描探针显微镜的工作机理,针对扫描探针高分辨率扫描成像需求,完成了AFM硬件模块和高速反馈控制方法、动态色差扫描成像方法、图像失真校正和滤波方法等设计。2、针对压电陶瓷(PZT)驱动器的非对称迟滞问题,在传统Prandtl-Ishlinskii (PI)模型基础上,研究提出了改进型非对称PI模型及模型参数辨识方法,开展了相关实验研究,验证了该迟滞模型的合理性。3、针对非线性迟滞所带来的扫描成像失真问题,在分析经典非线性校正方法基础上,研究了一种直接辨识非对称逆模型的前馈校正方法,并研究实现了相应的前馈控制器。实验研究表明,该方法有效实现了系统非线性迟滞校正,提高了系统的扫描成像质量。4、针对探针扫描轻敲模式研发中存在的高信噪比信号检测与振幅计算问题,研究设计了一种改进型数字锁相放大器(DLIA),实现了检测信号的高信噪比滤波功能。设计了一种高精度低运算量的振幅检测方法。设计实现了低资源消耗的轻敲模式激励信号生成方法。完成了相关实验研究和方法验证。上述研究,为自主研发高性能AFM系统和高技术装备提供了必要的理论方法和关键技术,有力推动了国家科研项目的顺利实施。
Other AbstractNano-scale observation and manipulation capability is a fundamental driving force of nano science and technology development. As a representative of scanning probe technology, atomic force microscope using (AFM) is an important techonology in the field of nano-scale observation and manipulation.AFM is an optical electrical and mechanical integration system. Due to the demand for ultra-high-resolution observations, each part of AFM system , such as high-precision scanning mechanism, a high-resolution photo-detector, high signal to niose ratio (SNR) signal processing, multi-channel high-precision control technology design and integration modules for system implementation are essential. The signal processing method, the control method, and the imaging method also has a decisive role to achieve system performance. At present, scanning probe technology in China is relatively weak. Thus, the development of independent research and development of scanning probe system has important significance to improve the technology of high level equipment and promote the development of nano-science and technology. Based on the National Natural Science Foundation of China (61304251) and the National 863 Program (2012AA041204), by investigating AFM principle systematically, this thesis focusing on a number of key technology of scanning probe microscope (SPM) research.1. Aim to scanning probe based high resolution imaging, the working mechanism of SPM was systematically analyzed. The hardware modules in AFM and high-speed feedback control method, dynamic color scan imaging method, image distortion correction and filtering method were also studied.2. Aim to the asymmetric hysteresis phenomenon of piezoelectric actuators, based on the traditional Prandtl-Ishlinskii (PI) model, the improved asymmetric PI model and model parameter identification methods was proposed. The relevant experimental study were carry out and the reasonableness of the hysteresis model was validated.3. Aim to image distortion caused by nonlinear hysteresis, based on the analysis of nonlinear classical correction methods, a feedforward calibration method based on identifying asymmetric inverse model directly was studied, and the controller based on the inverse model was cascaded. Experimental studies have shown that the method is effective to calibrate the nonlinear hysteresis, and improve imaging quality.4. Aim to high signal to noise ratio (SNR) signal detection and amplitude measurement in tapping mode scan, an improved digital lock-in amplifier (DLIA) was studied, an amplitude measurement method with high accuracy and low computation was implemented. Tapping mode excitation signal with low resource consumption was studied. Related research and method validation is completed. The above-mentioned study provides the necessary theory and key technology for self-developed AFM system with high performance and high-tech equipment, and powerfully promote the implementation of national research program.
Language中文
Contribution Rank1
Document Type学位论文
Identifierhttp://ir.sia.cn/handle/173321/16802
Collection机器人学研究室
Affiliation1.中国科学院沈阳自动化研究所
2.中国科学院大学
Recommended Citation
GB/T 7714
王栋. 扫描探针显微镜研制中的若干关键技术研究[D]. 沈阳. 中国科学院沈阳自动化研究所,2015.
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