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题名: Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy
作者: Shi JL(施佳林); Liu LQ(刘连庆); Zhou PL(周培林); Wang FF(王飞飞); Wang YC(王越超)
作者部门: 机器人学研究室
关键词: Atomic force microscopy (AFM) ; dynamic cantilever model ; subnanomachining ; ultrasonic-assisted machining
刊名: IEEE TRANSACTIONS ON NANOTECHNOLOGY
ISSN号: 1536-125X
出版日期: 2015
卷号: 14, 期号:4, 页码:735-741
收录类别: SCI ; EI
产权排序: 1
项目资助者: National Natural Science Foundation of China [61433017-61327014] ; CAS FEA International Partnership Program for Creative Research Teams
摘要: The ultrasonic vibration (UV)-assisted method, as an innovative nanomachining process, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the mechanism of nanomachining by ultrasonic-assisted AFM is still unclear. Furthermore, the mathematical control model for the nanomachining process is still lacking. Therefore, the UV-assisted nanomachining process is difficult to control on the nanometer-thick film, and no additional work has been reported at this time. In this paper, the mechanisms of ultrasonic-assisted AFM subnanomachining have been analyzed by using a point-mass model for the dynamic AFM cantilever, and a mathematical model of ultrasonic subnanomachining has been established on the basis of these mechanisms. The subnanomachining experiments were carried out on a 5-nm-thick polystyrene thin film using AFM under sample UV conditions. The experimental results have shown that the amplitude of sample UV can regulate the subnanomachining depth. Finally, the simulation results from the mathematical model and the experimental results have been compared in this study.
语种: 英语
WOS记录号: WOS:000357821500022
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]: THIN-FILMS ; NANOFABRICATION ; SURFACE ; NANOSCALE ; SCALE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; CANTILEVERS ; CHALLENGES ; TIP
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
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内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/16854
Appears in Collections:机器人学研究室_期刊论文

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Recommended Citation:
Shi JL,Liu LQ,Zhou PL,et al. Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2015,14(4):735-741.
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