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Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy
Shi JL(施佳林); Liu LQ(刘连庆); Zhou PL(周培林); Wang FF(王飞飞); Wang YC(王越超)
作者部门机器人学研究室
关键词Atomic Force Microscopy (Afm) Dynamic Cantilever Model Subnanomachining Ultrasonic-assisted Machining
发表期刊IEEE TRANSACTIONS ON NANOTECHNOLOGY
ISSN1536-125X
2015
卷号14期号:4页码:735-741
收录类别SCI ; EI
EI收录号20161202121033
WOS记录号WOS:000357821500022
产权排序1
资助机构National Natural Science Foundation of China [61433017-61327014] ; CAS FEA International Partnership Program for Creative Research Teams
摘要The ultrasonic vibration (UV)-assisted method, as an innovative nanomachining process, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the mechanism of nanomachining by ultrasonic-assisted AFM is still unclear. Furthermore, the mathematical control model for the nanomachining process is still lacking. Therefore, the UV-assisted nanomachining process is difficult to control on the nanometer-thick film, and no additional work has been reported at this time. In this paper, the mechanisms of ultrasonic-assisted AFM subnanomachining have been analyzed by using a point-mass model for the dynamic AFM cantilever, and a mathematical model of ultrasonic subnanomachining has been established on the basis of these mechanisms. The subnanomachining experiments were carried out on a 5-nm-thick polystyrene thin film using AFM under sample UV conditions. The experimental results have shown that the amplitude of sample UV can regulate the subnanomachining depth. Finally, the simulation results from the mathematical model and the experimental results have been compared in this study.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]THIN-FILMS ; NANOFABRICATION ; SURFACE ; NANOSCALE ; SCALE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; CANTILEVERS ; CHALLENGES ; TIP
WOS研究方向Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
引用统计
被引频次:3[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/16854
专题机器人学研究室
通讯作者Shi JL(施佳林)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
Shi JL,Liu LQ,Zhou PL,et al. Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2015,14(4):735-741.
APA Shi JL,Liu LQ,Zhou PL,Wang FF,&Wang YC.(2015).Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy.IEEE TRANSACTIONS ON NANOTECHNOLOGY,14(4),735-741.
MLA Shi JL,et al."Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy".IEEE TRANSACTIONS ON NANOTECHNOLOGY 14.4(2015):735-741.
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