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Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy
Shi JL(施佳林); Liu LQ(刘连庆); Zhou PL(周培林); Wang FF(王飞飞); Wang YC(王越超)
Department机器人学研究室
Source PublicationIEEE TRANSACTIONS ON NANOTECHNOLOGY
ISSN1536-125X
2015
Volume14Issue:4Pages:735-741
Indexed BySCI ; EI
EI Accession number20161202121033
WOS IDWOS:000357821500022
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China [61433017-61327014] ; CAS FEA International Partnership Program for Creative Research Teams
KeywordAtomic Force Microscopy (Afm) Dynamic Cantilever Model Subnanomachining Ultrasonic-assisted Machining
AbstractThe ultrasonic vibration (UV)-assisted method, as an innovative nanomachining process, has competitive advantages compared to traditional atomic force microscopy (AFM) nanomachining methods. However, the mechanism of nanomachining by ultrasonic-assisted AFM is still unclear. Furthermore, the mathematical control model for the nanomachining process is still lacking. Therefore, the UV-assisted nanomachining process is difficult to control on the nanometer-thick film, and no additional work has been reported at this time. In this paper, the mechanisms of ultrasonic-assisted AFM subnanomachining have been analyzed by using a point-mass model for the dynamic AFM cantilever, and a mathematical model of ultrasonic subnanomachining has been established on the basis of these mechanisms. The subnanomachining experiments were carried out on a 5-nm-thick polystyrene thin film using AFM under sample UV conditions. The experimental results have shown that the amplitude of sample UV can regulate the subnanomachining depth. Finally, the simulation results from the mathematical model and the experimental results have been compared in this study.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS KeywordTHIN-FILMS ; NANOFABRICATION ; SURFACE ; NANOSCALE ; SCALE ; NANOLITHOGRAPHY ; LITHOGRAPHY ; CANTILEVERS ; CHALLENGES ; TIP
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/16854
Collection机器人学研究室
Corresponding AuthorShi JL(施佳林)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Shi JL,Liu LQ,Zhou PL,et al. Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2015,14(4):735-741.
APA Shi JL,Liu LQ,Zhou PL,Wang FF,&Wang YC.(2015).Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy.IEEE TRANSACTIONS ON NANOTECHNOLOGY,14(4),735-741.
MLA Shi JL,et al."Subnanomachining by Ultrasonic-Vibration-Assisted Atomic Force Microscopy".IEEE TRANSACTIONS ON NANOTECHNOLOGY 14.4(2015):735-741.
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