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题名: Fabrication of graphene interdigitated electrodes and all-carbon electronic devices
作者: Xie SX(解双喜); Jiao ND(焦念东); Liu LQ(刘连庆); Tung, Steve
作者部门: 机器人学研究室
会议名称: 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议日期: April 7, 2015 - April 11, 2015
会议地点: Xi'an, China
会议主办者: Institute of Electrical and Electronics Engineers Inc.
会议录: 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议录出版者: IEEE
会议录出版地: Piscataway, NJ, USA
出版日期: 2015
页码: 314-317
收录类别: EI ; CPCI(ISTP)
ISBN号: 9781467366953
关键词: graphene ; interdigitated electrodes ; AFM ; SWCNTs ; all-carbon ; dielectrophoresis
摘要: Graphene has been widely studied because of its high mobility, superior mechanical properties and excellent thermal and chemical stability. This paper describes a novel and flexible method to fabricate graphene interdigitated electrodes and all-carbon field effect transistor (FET). In this approach, graphene is first grown by chemical vapor deposition (CVD) and assembled onto a microelectrode chip. Then, an atomic force microscopy (AFM) based mechanical machining method is employed to cut the graphene into interdigitated electrodes with nanogaps. Finally, single-walled carbon nanotubes (SWCNTs) are assembled onto the graphene interdigitated electrodes using dielectrophoresis to complete the FET device. The electrical properties of the fabricated SWCNT-graphene FET were investigated, and the I-V curves demonstrated the p-type nature of SWCNTs in the FET.
语种: 英语
产权排序: 1
WOS记录号: WOS:000380505700076
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/16897
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
Xie SX,Jiao ND,Liu LQ,et al. Fabrication of graphene interdigitated electrodes and all-carbon electronic devices[C]. 见:10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Xi'an, China. April 7, 2015 - April 11, 2015.
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