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题名:
Fabrication of graphene interdigitated electrodes and all-carbon electronic devices
作者: Xie SX(解双喜); Jiao ND(焦念东); Liu LQ(刘连庆); Tung, Steve
作者部门: 机器人学研究室
通讯作者: Tung, Steve
会议名称: 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议日期: April 7, 2015 - April 11, 2015
会议地点: Xi'an, China
会议主办者: Institute of Electrical and Electronics Engineers Inc.
会议录: 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
会议录出版者: IEEE
会议录出版地: Piscataway, NJ, USA
出版日期: 2015
页码: 314-317
收录类别: EI ; CPCI(ISTP)
EI收录号: 20153401190278
WOS记录号: WOS:000380505700076
产权排序: 1
ISBN号: 978-1-4673-6695-3
关键词: graphene ; interdigitated electrodes ; AFM ; SWCNTs ; all-carbon ; dielectrophoresis
摘要: Graphene has been widely studied because of its high mobility, superior mechanical properties and excellent thermal and chemical stability. This paper describes a novel and flexible method to fabricate graphene interdigitated electrodes and all-carbon field effect transistor (FET). In this approach, graphene is first grown by chemical vapor deposition (CVD) and assembled onto a microelectrode chip. Then, an atomic force microscopy (AFM) based mechanical machining method is employed to cut the graphene into interdigitated electrodes with nanogaps. Finally, single-walled carbon nanotubes (SWCNTs) are assembled onto the graphene interdigitated electrodes using dielectrophoresis to complete the FET device. The electrical properties of the fabricated SWCNT-graphene FET were investigated, and the I-V curves demonstrated the p-type nature of SWCNTs in the FET.
语种: 英语
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/16897
Appears in Collections:机器人学研究室_会议论文

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作者单位: 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, CAS, Shenyang, China
2.University of Chinese Academy of Sciences, Beijing, China
3.Department of Mechanical Engineering, University of Arkansas, Fayetteville, United States

Recommended Citation:
Xie SX,Jiao ND,Liu LQ,et al. Fabrication of graphene interdigitated electrodes and all-carbon electronic devices[C]. 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015. Xi'an, China. April 7, 2015 - April 11, 2015.Fabrication of graphene interdigitated electrodes and all-carbon electronic devices.
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