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题名: MEMS-fabricated ICPE grippers for aqueous applications
作者: Zhou, J.W.L.; Li WR(李文荣)
作者部门: 机器人学研究室
会议名称: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
会议日期: June 8-12, 2003
会议地点: Boston, MA, United states
会议主办者: IEEE Electron Devices Society (EDS)
会议录: TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
会议录出版者: IEEE
出版日期: 2003
页码: 556-559
收录类别: EI
ISBN号: 9780780377318
摘要: This paper presents the results of our ongoing investigation of using Nafion solution to construct micron scale actuators as grippers for underwater manipulation. We have demonstrated MEMS-based fabrication of cantilever structures composed of Au/Nafion/Au film layers on silicon substrates is possible. The smallest actuators fabricated were 30μm wide, 300μm long and 0.4μm thick. We have shown that 2-finger actuators (each 100μm wide, 1200μm long and 0.4μm thick) could be fully actuated in water at ∼7V DC. In addition, we have found that micro Au/Nafion/Au cantilevers can respond to pH level changes in a solution environment, suggesting that they could potentially be used as biological sensors.
语种: 英语
产权排序: 2
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/17199
Appears in Collections:机器人学研究室_会议论文

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