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专利名称: METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION
其他题名: 面向IC装备控制软件的GUI平台化实现方法
作者: Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
所属部门: 工业控制网络与系统研究室
专利权人: 中国科学院沈阳自动化研究所
专利国别: 美国
专利类型: 发明
专利状态: 有效
摘要: The present invention relates to a method for realizing IC (integrate circuit) equipment control software-oriented GUI (graphical user interface) platformization, comprising the following steps: developing a corresponding IC equipment drive module in accordance with the characteristics of different manufacturers' IC equipment and drawing a GUI platform; connecting the monitoring host of the IC equipment to a controller through the IC equipment drive module, thereby forming a communication network; the IC equipment drive module reads data in the controller through the connection network and maps the data to the general data layer of the GUI platform; the GUI platform performs real-time display, control, and exception handling on the data through the general data layer, thus realizing GUI platformization of the IC equipment control software. The present invention realizes a cross-platform mechanism, improves the cluster monitoring ability of the wafer manufacturing equipment, is able to meet the user's demands for flexible configuration of the human-machine interface of the corresponding control system such that the whole production process can be quickly configured in a very short time, and meets the needs of advanced startup of the production.
优先权数据: CN201010508022A;CN2010079216W
是否PCT专利:
申请日期: 2010-11-29
公开日期: 2013-08-22
专利申请号: US201013879248
公布/公告号: US2013219306
语种: 英语
产权排序: 1
内容类型: 专利
URI标识: http://ir.sia.cn/handle/173321/17282
Appears in Collections:工业控制网络与系统研究室_专利

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Recommended Citation:
Yu HB,Xu AD,Liu MZ,et al. METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION. US2013219306. 2013.
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