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METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION
其他题名面向IC装备控制软件的GUI平台化实现方法
Yu HB(于海斌); Xu AD(徐皑冬); Liu MZ(刘明哲); Li Z(李正); Wang K(王锴); Jin N(金妮); Zhang JL(张吉龙)
所属部门工业控制网络与系统研究室
专利权人SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
授权国家美国
专利类型发明
专利状态公开
摘要The present invention relates to a method for realizing IC (integrate circuit) equipment control software-oriented GUI (graphical user interface) platformization, comprising the following steps: developing a corresponding IC equipment drive module in accordance with the characteristics of different manufacturers' IC equipment and drawing a GUI platform; connecting the monitoring host of the IC equipment to a controller through the IC equipment drive module, thereby forming a communication network; the IC equipment drive module reads data in the controller through the connection network and maps the data to the general data layer of the GUI platform; the GUI platform performs real-time display, control, and exception handling on the data through the general data layer, thus realizing GUI platformization of the IC equipment control software. The present invention realizes a cross-platform mechanism, improves the cluster monitoring ability of the wafer manufacturing equipment, is able to meet the user's demands for flexible configuration of the human-machine interface of the corresponding control system such that the whole production process can be quickly configured in a very short time, and meets the needs of advanced startup of the production.
优先权数据cn201010508022a;cn2010079216w
PCT属性
申请日期2010-11-29
2013-08-22
申请号US201013879248
公开(公告)号US2013219306A1
语种英语
产权排序1
文献类型专利
条目标识符http://ir.sia.cn/handle/173321/17282
专题工业控制网络与系统研究室
作者单位SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
推荐引用方式
GB/T 7714
Yu HB,Xu AD,Liu MZ,et al. METHOD FOR REALIZING IC EQUIPMENT CONTROL SOFTWARE-ORIENTED GUI PLATFORMIZATION[P]. 2013-08-22.
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