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一种用于原子力显微镜的扫描探针夹持装置
Alternative TitleScanning probe clamping device for atomic force microscope
于鹏; 刘柱; 周磊; 杨洋; 王栋; 刘连庆; 焦念东
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status有权
Abstract本发明涉及一种用于原子力显微镜的扫描探针夹持装置,包括固定夹具、探针夹连接器、探针夹;所述探针夹连接器固定于固定夹具上,并与探针夹连接。本发明探针夹体积小、质量轻,能够固定到压电陶瓷驱动器上,可以应用于倒置式原子力显微镜扫描头的结构设计中;能够实现探针夹的快速装卸、探针的快速安装和固定,以及为探针提供纳米级位移的振动。
Other AbstractThe invention relates to a scanning probe clamping device for atomic force microscope; the device comprises a fixed clamp, a probe clamping connector, and a probe clamp; the probe clamping connector is fixed to the fixed clamp and is connected to the probe clamp. The device of the invention is small in size and light in weight; it can be secured to a piezoelectric ceramic driver and can be applied to a reversed-type atomic force microscope scanning head. The clamping device is able to realize the fast detachment of a probe clamp, the fast mounting and fixing of a probe and the vibration of Nano grade provided to the probe.
PCT Attributes
Application Date2014-05-20
2015-11-25
Date Available2018-01-02
Application NumberCN201410214080.0
Open (Notice) NumberCN105092900A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/17296
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
于鹏,刘柱,周磊,等. 一种用于原子力显微镜的扫描探针夹持装置[P]. 2015-11-25.
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