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Alternative TitleScanning probe clamping device for atomic force microscope
于鹏; 刘柱; 周磊; 杨洋; 王栋; 刘连庆; 焦念东
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention relates to a scanning probe clamping device for atomic force microscope; the device comprises a fixed clamp, a probe clamping connector, and a probe clamp; the probe clamping connector is fixed to the fixed clamp and is connected to the probe clamp. The device of the invention is small in size and light in weight; it can be secured to a piezoelectric ceramic driver and can be applied to a reversed-type atomic force microscope scanning head. The clamping device is able to realize the fast detachment of a probe clamp, the fast mounting and fixing of a probe and the vibration of Nano grade provided to the probe.
PCT Attributes
Application Date2014-05-20
Date Available2018-01-02
Application NumberCN201410214080.0
Open (Notice) NumberCN105092900A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
于鹏,刘柱,周磊,等. 一种用于原子力显微镜的扫描探针夹持装置[P]. 2015-11-25.
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