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Efficient Shape Reconstruction of Microlens Using Optical Microscopy
Wei YJ(魏阳杰); Wu CD(吴成东); Wang Y(王义); Dong ZL(董再励)
Department机器人学研究室
Source PublicationIEEE Transactions on Industrial Electronics
ISSN0278-0046
2015
Volume62Issue:12Pages:7655-7664
Indexed BySCI ; EI
EI Accession number20154801604834
WOS IDWOS:000365019500034
Contribution Rank4
KeywordMicrolens Optical Diffusion Polydimethylsiloxane (Pdms) Relative Blurring Shape From Defocus(Sfd).
AbstractThe imaging properties of a microlens are highly related to its 3-D profile; therefore, it is of fundamental importance to measure its 3-D geometrical characteristics with high accuracy after industrial fabrication. However, common 3-D measurement tools are difficult to use for fast, noninvasive, and precise 3-D measurement of a microlens. Depth acquisition is a direct way to understand the 3-D properties of objects in computer vision, and shape from defocus (SFD) has been demonstrated to be effective for 3-D reconstruction. In this paper, a depth reconstruction method from blurring using optical microscopy and optical diffraction is proposed to reconstruct the global shape of a microlens. First, the relationship between the intensity distribution and the depth information is introduced. Second, a blurring imaging model with optical diffraction is formulated through curve fitting, accounting for relative blurring and heat diffusion, and a new SFD method with optical diffraction and defocused images is proposed. Finally, a polydimethylsiloxane (PDMS) microlens is used to validate the proposed SFD method, and the results show that its global shape can be reconstructed with high precision. The average estimation error is 77 nm, and the cost time is reduced by 92.5% compared with atomic force microscopy scanning.
Language英语
WOS HeadingsScience & Technology ; Technology
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS KeywordINTERFEROMETER ; IMAGES ; DEPTH ; LENS
WOS Research AreaAutomation & Control Systems ; Engineering ; Instruments & Instrumentation
Citation statistics
Cited Times:7[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/17313
Collection机器人学研究室
Corresponding AuthorWei YJ(魏阳杰)
Affiliation1.College of Information Science and Engineering, Northeastern University, Shenyang, China
2.Department of Information Technology, Uppsala University, Uppsala, Sweden
3.Northeastern University, Shenyang, China
4.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
Recommended Citation
GB/T 7714
Wei YJ,Wu CD,Wang Y,et al. Efficient Shape Reconstruction of Microlens Using Optical Microscopy[J]. IEEE Transactions on Industrial Electronics,2015,62(12):7655-7664.
APA Wei YJ,Wu CD,Wang Y,&Dong ZL.(2015).Efficient Shape Reconstruction of Microlens Using Optical Microscopy.IEEE Transactions on Industrial Electronics,62(12),7655-7664.
MLA Wei YJ,et al."Efficient Shape Reconstruction of Microlens Using Optical Microscopy".IEEE Transactions on Industrial Electronics 62.12(2015):7655-7664.
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