中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 装备制造技术研究室  > 会议论文
题名: Study on the manufacturing process of polymer microfluidic chip with integrated Cu micro array electrode
作者: Gu, Yaoxin; Qiao HC(乔红超)
作者部门: 装备制造技术研究室
会议名称: 2014 3rd International Conference on Applied Mechanics and Materials (ICAMM 2014)
会议日期: November 15-16, 2014
会议地点: Shenzhen, China
会议录: Applied Mechanics and Materials
会议录出版者: Trans Tech Publications
会议录出版地: Zurich-Durnten, Switzerland
出版日期: 2014
页码: 884-887
ISSN号: 1660-9336
ISBN号: 978-3-03835-387-4
关键词: Fracture ; Micro Array Electrode ; Microfluidic Chips ; Thermal Bonding
摘要: To produce perfect polymer microfluidic chip with integrated metal micro array electrode, an oxygen-plasma assisted manufacturing process was developed. The Cu micro array electrodes on the poly substrate was formed by photolithography, sputtering and wet etching; the micro channels on the polymer plate were hot-embossed using metal master; the bonding of cover plate and substrate using thermal bonding. The surface of the polymer plate with micro channels was treated by oxygen-plasma before thermal bonding. The oxygen-plasma treatment could decrease thermal bonding temperature from 100 degC to 85 degC. The bonding of this chip is complete, the micro electrode array keeps its integrity, and the micro channel is not distorted obviously.
语种: 英语
产权排序: 2
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/17327
Appears in Collections:装备制造技术研究室_会议论文

Files in This Item: Download All
File Name/ File Size Content Type Version Access License
Study on the Manufacturing Process of Polymer Microfluidic Chip with Integrated Cu Micro Array Electrode.pdf(366KB)会议论文--开放获取View Download

Recommended Citation:
Gu, Yaoxin,Qiao HC. Study on the manufacturing process of polymer microfluidic chip with integrated Cu micro array electrode[C]. 见:2014 3rd International Conference on Applied Mechanics and Materials (ICAMM 2014). Shenzhen, China. November 15-16, 2014.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Gu, Yaoxin]'s Articles
[Qiao HC(乔红超)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Gu, Yaoxin]‘s Articles
[Qiao HC(乔红超)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Study on the Manufacturing Process of Polymer Microfluidic Chip with Integrated Cu Micro Array Electrode.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace