SIA OpenIR  > 工业控制网络与系统研究室
Research on the Factory Automation Software Based on the SEMI Standard
Wang CX(王晨曦); Liu MZ(刘明哲); Xu AD(徐皑冬); Jin N(金妮)
作者部门工业控制网络与系统研究室
会议名称2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015)
会议日期June 27-28, 2015
会议地点Guangzhou, China
会议录名称PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON MATERIAL, MECHANICAL AND MANUFACTURING ENGINEERING
出版者Atlantis Press
出版地Paris
2015
页码662-665
收录类别CPCI(ISTP)
WOS记录号WOS:000367097600129
产权排序1
ISBN号978-94-6252-100-1
关键词Ic Equipment Semi Fa
摘要Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard.
语种英语
引用统计
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/17406
专题工业控制网络与系统研究室
作者单位Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
推荐引用方式
GB/T 7714
Wang CX,Liu MZ,Xu AD,et al. Research on the Factory Automation Software Based on the SEMI Standard[C]. Paris:Atlantis Press,2015:662-665.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Research on the Fact(790KB)会议论文 开放获取CC BY-NC-SA浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Wang CX(王晨曦)]的文章
[Liu MZ(刘明哲)]的文章
[Xu AD(徐皑冬)]的文章
百度学术
百度学术中相似的文章
[Wang CX(王晨曦)]的文章
[Liu MZ(刘明哲)]的文章
[Xu AD(徐皑冬)]的文章
必应学术
必应学术中相似的文章
[Wang CX(王晨曦)]的文章
[Liu MZ(刘明哲)]的文章
[Xu AD(徐皑冬)]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Research on the Factory Automation Software Based on the SEMI Standard.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。