中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 工业控制网络与系统研究室  > 会议论文
题名: Research on the Factory Automation Software Based on the SEMI Standard
作者: Wang CX(王晨曦); Liu MZ(刘明哲); Xu AD(徐皑冬); Jin N(金妮)
作者部门: 工业控制网络与系统研究室
会议名称: 2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015)
会议日期: June 27-28, 2015
会议地点: Guangzhou, China
会议录: PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON MATERIAL, MECHANICAL AND MANUFACTURING ENGINEERING
会议录出版者: Atlantis Press
会议录出版地: Paris
出版日期: 2015
页码: 662-665
收录类别: CPCI(ISTP)
ISBN号: 978-94-6252-100-1
关键词: IC equipment ; SEMI ; FA
摘要: Factory automation (FA) system software is a bridge to realize information exchange between processing equipment of semiconductor equipment and factory host. It receives the control instruction sent by a host, and sends the control instruction to the manufacturing equipment after internal analysis and processing. At the same time, FA receives the real time data and the various process parameters sent by equipment, processes the data, and sends the data to the host. In this paper, analysis of the process of semiconductor processing equipment, according to the actual needs of the semiconductor processing equipment, research on FA Software based on the SEMI standard.
语种: 英语
产权排序: 1
WOS记录号: WOS:000367097600129
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/17406
Appears in Collections:工业控制网络与系统研究室_会议论文

Files in This Item: Download All
File Name/ File Size Content Type Version Access License
Research on the Factory Automation Software Based on the SEMI Standard.pdf(790KB)会议论文--开放获取View Download

Recommended Citation:
Wang CX,Liu MZ,Xu AD,et al. Research on the Factory Automation Software Based on the SEMI Standard[C]. 见:2015 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015). Guangzhou, China. June 27-28, 2015.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Wang CX(王晨曦)]'s Articles
[Liu MZ(刘明哲)]'s Articles
[Xu AD(徐皑冬)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Wang CX(王晨曦)]‘s Articles
[Liu MZ(刘明哲)]‘s Articles
[Xu AD(徐皑冬)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Research on the Factory Automation Software Based on the SEMI Standard.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace