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Scheduling method for single-arm multi-cluster tools with residency time constraints
Hu JT(胡静涛); Li, Linying
作者部门信息服务与智能控制 技术研究室
会议名称2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议日期June 8-12, 2015
会议地点Shenyang, China
会议录名称2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
出版者IEEE
出版地Piscataway, NJ, USA
2015
页码1574-1578
收录类别EI ; CPCI(ISTP)
EI收录号20161402187730
WOS记录号WOS:000380502300287
产权排序1
ISSN号2379-7711
ISBN号978-1-4799-8730-6
关键词Semiconductor Manufacutory Multiple-cluster Tools Residency Time Cosntraints Buffer/process Mudules Single-arm Robot Scheduling Analysis
摘要In semiconductor manufacturing, the throughout analysis and robot action sequence are crucial for multi-cluster tools scheduling problems. This paper studies a general robot scheduling problem for multi-cluster tools with the single-arm robot and buffer process modules. Firstly, the scheduling model with constraints of processing module and robots transport is addressed. Secondly, the lower bound of cycle time is theoretically proved. And based on decomposition idea, the heuristic scheduling method, which produces robot action sequence by virtue of random processing time and cycle time, is proposed. Finally, the superiority of the proposed method is proved simulation results.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/17670
专题信息服务与智能控制技术研究室
作者单位1.Department of Information Service and Intelligent Control Technology, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning Province, China
2.School of Software, Dalian University of Foreign Languages, Dalian, Liaoning Province, China
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Hu JT,Li, Linying. Scheduling method for single-arm multi-cluster tools with residency time constraints[C]. Piscataway, NJ, USA:IEEE,2015:1574-1578.
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