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Shape reconstruction based on a new blurring model at the micro/nanometer scale
Wei YJ(魏阳杰); Wu CD(吴成东); Wang WX(王文学)
作者部门机器人学研究室
关键词Blurred Imaging Model 3d Shape Heat Diffusion Micro/nanometer Scale Reconstruction
发表期刊Sensors (Switzerland)
ISSN1424-8220
2016
卷号16期号:3页码:1-17
收录类别SCI ; EI
EI收录号20161002048893
WOS记录号WOS:000373713600106
产权排序1
资助机构Natural Science Foundation of China (No. 61305025, 61532007),
摘要Real-time observation of three-dimensional (3D) information has great significance in nanotechnology. However, normal nanometer scale observation techniques, including transmission electron microscopy (TEM), and scanning probe microscopy (SPM), have some problems to obtain 3D information because they lack non-destructive, intuitive, and fast imaging ability under normal conditions, and optical methods have not widely used in micro/nanometer shape reconstruction due to the practical requirements and the imaging limitations in micro/nano manipulation. In this paper, a high resolution shape reconstruction method based on a new optical blurring model is proposed. Firstly, the heat diffusion physics equation is analyzed and the optical diffraction model is modified to directly explain the basic principles of image blurring resulting from depth variation. Secondly, a blurring imaging model is proposed based on curve fitting of a 4th order polynomial curve. The heat diffusion equations combined with the blurring imaging are introduced, and their solution is transformed into a dynamic optimization problem. Finally, the experiments with a standard nanogrid, an atomic force microscopy (AFM) cantilever and a microlens have been conducted. The experiments prove that the proposed method can reconstruct 3D shapes at the micro/nanometer scale, and the minimal reconstruction error is 3 nm.
语种英语
WOS标题词Science & Technology ; Physical Sciences ; Technology
WOS类目Chemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS研究方向Chemistry ; Electrochemistry ; Instruments & Instrumentation
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文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/17715
专题机器人学研究室
通讯作者Wei YJ(魏阳杰)
作者单位1.College of Computer Science and Engineering, Northeastern University, Shenyang, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Science, Shenyang, China
3.College of Information Science and Engineering, Northeastern University, Shenyang, China
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GB/T 7714
Wei YJ,Wu CD,Wang WX. Shape reconstruction based on a new blurring model at the micro/nanometer scale[J]. Sensors (Switzerland),2016,16(3):1-17.
APA Wei YJ,Wu CD,&Wang WX.(2016).Shape reconstruction based on a new blurring model at the micro/nanometer scale.Sensors (Switzerland),16(3),1-17.
MLA Wei YJ,et al."Shape reconstruction based on a new blurring model at the micro/nanometer scale".Sensors (Switzerland) 16.3(2016):1-17.
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