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Shape reconstruction based on a new blurring model at the micro/nanometer scale
Wei YJ(魏阳杰); Wu CD(吴成东); Wang WX(王文学)
Department机器人学研究室
Source PublicationSensors (Switzerland)
ISSN1424-8220
2016
Volume16Issue:3Pages:1-17
Indexed BySCI ; EI
EI Accession number20161002048893
WOS IDWOS:000373713600106
Contribution Rank1
Funding OrganizationNatural Science Foundation of China (No. 61305025, 61532007),
KeywordBlurred Imaging Model 3d Shape Heat Diffusion Micro/nanometer Scale Reconstruction
AbstractReal-time observation of three-dimensional (3D) information has great significance in nanotechnology. However, normal nanometer scale observation techniques, including transmission electron microscopy (TEM), and scanning probe microscopy (SPM), have some problems to obtain 3D information because they lack non-destructive, intuitive, and fast imaging ability under normal conditions, and optical methods have not widely used in micro/nanometer shape reconstruction due to the practical requirements and the imaging limitations in micro/nano manipulation. In this paper, a high resolution shape reconstruction method based on a new optical blurring model is proposed. Firstly, the heat diffusion physics equation is analyzed and the optical diffraction model is modified to directly explain the basic principles of image blurring resulting from depth variation. Secondly, a blurring imaging model is proposed based on curve fitting of a 4th order polynomial curve. The heat diffusion equations combined with the blurring imaging are introduced, and their solution is transformed into a dynamic optimization problem. Finally, the experiments with a standard nanogrid, an atomic force microscopy (AFM) cantilever and a microlens have been conducted. The experiments prove that the proposed method can reconstruct 3D shapes at the micro/nanometer scale, and the minimal reconstruction error is 3 nm.
Language英语
WOS HeadingsScience & Technology ; Physical Sciences ; Technology
WOS SubjectChemistry, Analytical ; Electrochemistry ; Instruments & Instrumentation
WOS Research AreaChemistry ; Electrochemistry ; Instruments & Instrumentation
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/17715
Collection机器人学研究室
Corresponding AuthorWei YJ(魏阳杰)
Affiliation1.College of Computer Science and Engineering, Northeastern University, Shenyang, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Science, Shenyang, China
3.College of Information Science and Engineering, Northeastern University, Shenyang, China
Recommended Citation
GB/T 7714
Wei YJ,Wu CD,Wang WX. Shape reconstruction based on a new blurring model at the micro/nanometer scale[J]. Sensors (Switzerland),2016,16(3):1-17.
APA Wei YJ,Wu CD,&Wang WX.(2016).Shape reconstruction based on a new blurring model at the micro/nanometer scale.Sensors (Switzerland),16(3),1-17.
MLA Wei YJ,et al."Shape reconstruction based on a new blurring model at the micro/nanometer scale".Sensors (Switzerland) 16.3(2016):1-17.
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