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一种SICM的相位调制成像模式扫描装置和方法
Alternative TitlePhase modulation imaging mode scanning device and method of SICM
刘连庆; 李鹏; 李广勇; 王越超; 杨洋; 张常麟
Department机器人学研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status有权
Abstract本发明涉及一种SICM的相位调制成像模式扫描装置,包括信号发生器、锁相放大器、膜片钳放大器、控制器、探针、XY纳米平台和Z向纳米压电陶瓷;所述信号发生器、膜片钳放大器、锁相放大器、控制器依次连接;所述信号发生器与锁相放大器连接,膜片钳放大器与探针连接;方法包括:信号发生器输出两路交流信号分别至锁相放大器、膜片钳放大器;调节膜片钳放大器的补偿电容值;锁相放大器提取电流分量,并将幅值反馈至控制器,控制器根据该幅值实时控制探针高度,实现样品的扫描。本发明仅提取某一频率下的交流分量作为反馈值,因此能克服直流模式下直流漂移、易受电气噪声影响等缺点;具有比传统交流模式更高的调制频率,因此可实现加快扫描的目的。
Other AbstractThe invention relates to a phase modulation imaging mode scanning device of an SICM. The scanning device comprises a signal generator, a phase-locked amplifier, a patch clamp amplifier, a controller, a probe, an XY nanometer platform and a Z-direction nanometer piezoelectric ceramic. The signal generator, the patch clamp amplifier, the phase-locked amplifier and the controller are connected in sequence; the signal generator is connected with the phase-locked amplifier; and the patch clamp amplifier is connected with the probe. The method comprises the following steps: the signal generator outputs two paths of AC signals to the phase-locked amplifier and the patch clamp amplifier respectively; the compensation capacitance of the patch clamp amplifier is adjusted; the phase-locked amplifier extracts current component and feeds back the amplitude to the controller; and the controller controls the height of the probe in real time according to the amplitude, and scanning of a sample is realized. According to the phase modulation imaging mode scanning device and method, only the alternating current component under some frequency is extracted to serve as the feedback value, so that the defects of DC drifting and easy electrical noise influence under a DC mode and the like can be overcome; and compared with a conventional AC mode, the method realizes higher modulation frequency, and the purpose of accelerating scanning can be realized.
PCT Attributes
Application Date2014-07-24
2016-02-03
Date Available2019-01-22
Application NumberCN201410357300.5
Open (Notice) NumberCN105301290A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/17742
Collection机器人学研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
刘连庆,李鹏,李广勇,等. 一种SICM的相位调制成像模式扫描装置和方法[P]. 2016-02-03.
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