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题名:
Electric field induced fabrication of nano dots, lines and pits with AFM
作者: Li DH(李登辉); Liu ZL(刘增磊); Zhang, Ying; Jiao ND(焦念东); Liu LQ(刘连庆)
作者部门: 机器人学研究室
会议名称: 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议日期: June 8-12, 2015
会议地点: Shenyang, China
会议录: 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议录出版者: IEEE
会议录出版地: Piscataway, NJ, USA
出版日期: 2015
页码: 1143-1148
收录类别: EI ; CPCI(ISTP)
ISSN号: 2379-7711
ISBN号: 978-1-4799-8730-6
关键词: Nanomanipulation ; nanodeposition ; atomic force microscope ; electric field ; field emission
摘要: This paper researched the electric field induced fabrication with atomic force microscope (AFM). Current-induced deposition rather than voltage-induced deposition is introduced. With this method, nano dots, lines and pits can be fabricated. Especially, the nano lines can be deposited continuously, rather than depositing a row of nano dots to form a nano line. This method is expected to be used as a nano welding technique, which can improve the physical and electrical connections between the various components of nano devices.
语种: 英语
产权排序: 1
EI收录号: 20161402187769
WOS记录号: WOS:000380502300212
Citation statistics:
内容类型: 会议论文
URI标识: http://ir.sia.cn/handle/173321/18512
Appears in Collections:机器人学研究室_会议论文

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Recommended Citation:
Li DH,Liu ZL,Zhang, Ying,et al. Electric field induced fabrication of nano dots, lines and pits with AFM[C]. 2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER). Shenyang, China. June 8-12, 2015.Electric field induced fabrication of nano dots, lines and pits with AFM.
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