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Electric field induced fabrication of nano dots, lines and pits with AFM
Li DH(李登辉); Liu ZL(刘增磊); Zhang, Ying; Jiao ND(焦念东); Liu LQ(刘连庆)
作者部门机器人学研究室
会议名称2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
会议日期June 8-12, 2015
会议地点Shenyang, China
会议录名称2015 IEEE International Conference on Cyber Technology in Automation, Control, and Intelligent Systems (CYBER)
出版者IEEE
出版地Piscataway, NJ, USA
2015
页码1143-1148
收录类别EI ; CPCI(ISTP)
EI收录号20161402187769
WOS记录号WOS:000380502300212
产权排序1
ISSN号2379-7711
ISBN号978-1-4799-8730-6
关键词Nanomanipulation Nanodeposition Atomic Force Microscope Electric Field Field Emission
摘要This paper researched the electric field induced fabrication with atomic force microscope (AFM). Current-induced deposition rather than voltage-induced deposition is introduced. With this method, nano dots, lines and pits can be fabricated. Especially, the nano lines can be deposited continuously, rather than depositing a row of nano dots to form a nano line. This method is expected to be used as a nano welding technique, which can improve the physical and electrical connections between the various components of nano devices.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/18512
专题机器人学研究室
通讯作者Jiao ND(焦念东); Liu LQ(刘连庆)
作者单位1.Shenyang Jianzhu University, Shenyang, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, CAS, Shenyang, China
3.Nanyang Institute of Technology, Nanyang, China
推荐引用方式
GB/T 7714
Li DH,Liu ZL,Zhang, Ying,et al. Electric field induced fabrication of nano dots, lines and pits with AFM[C]. Piscataway, NJ, USA:IEEE,2015:1143-1148.
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