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Alternative TitleQuick template-free patterned electrode manufacturing method
刘连庆; 刘娜; 李文荣; 王越超; 于海波; 董再励
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Other AbstractThe invention relates to a quick template-free patterned electrode manufacturing method comprising the following steps: a light spot pattern is made in a computer; the pattern is projected on a chip through a projector to form a light spot; a signal generator generates an alternating-current signal to electrify the chip; and under the double action of the light spot and electrification, a metal electrode is formed on a photosensitive material base in the chip within a set period of time. According to the invention, based on the fact that metal ions can be reduced and absorbed on the surface of a virtual electrode, the shape of a metal deposition area can be controlled by controlling the shape of the light spot shining on an amorphous silicon layer, so as to manufacture a variety of patterns. By using the micro pattern manufacturing method, no physical template is needed, and a needed circuit can be obtained by designing the light spot directly according to the needed circuit structure and shape.
PCT Attributes
Application Date2014-08-26
Application NumberCN201410424509.9
Open (Notice) NumberCN105448695A
Contribution Rank1
Document Type专利
Recommended Citation
GB/T 7714
刘连庆,刘娜,李文荣,等. 一种快速无模板的图形化电极制作方法[P]. 2016-03-30.
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