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The co-design of interface sensing and tailoring of ultra-thin film with ultrasonic vibration-assisted AFM system
Shi JL(施佳林); Liu LQ(刘连庆); Li GY(李广勇)
Department机器人学研究室
Source PublicationNanotechnology
ISSN0957-4484
2016
Volume27Issue:23Pages:1-10
Indexed BySCI ; EI
EI Accession number20162202447733
WOS IDWOS:000376404100008
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China (61522312, 61433017) and the CAS the Interdisciplinary and Collaboration Team of the Chinese Academy of Sciences.
KeywordAtomic Force Microscopy Ultrasonic Vibration Ultra-thin Film Tailoring
AbstractUltra-thin films (e.g., graphene, MoS2, and black phosphorus) have shown amazing performance in a variety of applications. The tailoring or machining of these ultra-thin films is often the preliminary step to manufacturing them into functional devices. Atomic force microscopy (AFM) is a flexible, high-efficiency and low-cost tailoring or machining tool with the advantages of high resolution and precision. However, the current AFM-based tailoring methods are often set up as an open loop regarding the machined depth and state. Thus, because of a lack of real-time feedback, an inappropriate applied force leads to over-cutting or under-cutting, which limits the performance of the manufactured devices. In this study, we propose a real-time tailoring and sensing method based on an ultrasonic vibration-assisted (USV-assisted) AFM system to solve the above problems. With the proposed method, the machined depth and state can be sensed in real time by detecting the phase value of the vibrating cantilever. To characterize and gain insight into the phase responses of the cantilever to the machined depth and sample material, a theoretical dynamic model of a cantilever-film vibrating system is introduced to model the machining process, and a sensing theory of machined depth and state is developed based on a USV-assisted AFM system. The experimental results verify the feasibility and effectiveness of the proposed method, which in turn lay the foundation for a closed-loop tailoring control strategy for ultra-thin films. 
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectNanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS KeywordATOMIC-FORCE MICROSCOPY ; GRAPHENE ; MOS2 ; NANORIBBONS ; ELECTRONICS ; CONTACTS
WOS Research AreaScience & Technology - Other Topics ; Materials Science ; Physics
Citation statistics
Cited Times:9[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/18678
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of the Chinese Academy of Sciences, Beijing 100049, China
3.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15261, United States
Recommended Citation
GB/T 7714
Shi JL,Liu LQ,Li GY. The co-design of interface sensing and tailoring of ultra-thin film with ultrasonic vibration-assisted AFM system[J]. Nanotechnology,2016,27(23):1-10.
APA Shi JL,Liu LQ,&Li GY.(2016).The co-design of interface sensing and tailoring of ultra-thin film with ultrasonic vibration-assisted AFM system.Nanotechnology,27(23),1-10.
MLA Shi JL,et al."The co-design of interface sensing and tailoring of ultra-thin film with ultrasonic vibration-assisted AFM system".Nanotechnology 27.23(2016):1-10.
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