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题名:
Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
作者: Liu N(刘娜); Wang FF(王飞飞); Liu LQ(刘连庆); Yu HB(于海波); Xie, Shaorong; Wang, Jun; Wang YC(王越超); Lee, Gwo-Bin; Li WJ(李文荣)
作者部门: 机器人学研究室
通讯作者: 刘连庆 ; 李文荣
刊名: SCIENTIFIC REPORTS
ISSN号: 2045-2322
出版日期: 2016
卷号: 6, 页码:1-10
收录类别: SCI
产权排序: 1
项目资助者: National Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510] ; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14] ; Hong Kong Research Grants Council [CityU 118513] ; CAS-FEA International Partnership Program for Creative Research Teams ; National 10000-Talent Program ; External Cooperation Program of BIC, CAS [181231KYSB20130007]
摘要: The synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.
语种: 英语
WOS记录号: WOS:000381978200001
WOS标题词: Science & Technology
类目[WOS]: Multidisciplinary Sciences
关键词[WOS]: ZINC-OXIDE ; LITHOGRAPHY ; FABRICATION ; TRANSISTORS ; FILM ; DIELECTROPHORESIS ; ELECTRODEPOSITION ; MICROSTRUCTURES ; MICROPARTICLES ; MANIPULATION
研究领域[WOS]: Science & Technology - Other Topics
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内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/19182
Appears in Collections:机器人学研究室_期刊论文

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Recommended Citation:
Liu N,Wang FF,Liu LQ,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. SCIENTIFIC REPORTS,2016,6:1-10.
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