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Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials
Liu N(刘娜); Wang FF(王飞飞); Liu LQ(刘连庆); Yu HB(于海波); Xie, Shaorong; Wang, Jun; Wang YC(王越超); Lee, Gwo-Bin; Li WJ(李文荣)
Department机器人学研究室
Source PublicationSCIENTIFIC REPORTS
ISSN2045-2322
2016
Volume6Pages:1-10
Indexed BySCI
WOS IDWOS:000381978200001
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China [61302003, 61522312, 61178007, 61522510] ; NSFC/RGC Joint Research Scheme [51461165501, N_CityU132/14] ; Hong Kong Research Grants Council [CityU 118513] ; CAS-FEA International Partnership Program for Creative Research Teams ; National 10000-Talent Program ; External Cooperation Program of BIC, CAS [181231KYSB20130007]
AbstractThe synthesis and assembly of components are key steps in micro/nano device manufacturing. In this article, we report an optically controlled assembly method that can rapidly pattern micro/nano devices by directly assembling ions and nanomaterials without expensive physical masks and complex etching processes. Utilizing this controllable process, different types of device components (e.g., metallic and semiconductor) can be fabricated and assembled in 10-30 seconds, which is far more rapid and cost-effective than any other micro/nano fabrication method.
Language英语
WOS HeadingsScience & Technology
WOS SubjectMultidisciplinary Sciences
WOS KeywordZINC-OXIDE ; LITHOGRAPHY ; FABRICATION ; TRANSISTORS ; FILM ; DIELECTROPHORESIS ; ELECTRODEPOSITION ; MICROSTRUCTURES ; MICROPARTICLES ; MANIPULATION
WOS Research AreaScience & Technology - Other Topics
Citation statistics
Cited Times:9[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/19182
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆); Li WJ(李文荣)
Affiliation1.State Key Lab of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning 10016, China
2.School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China
3.University of Chinese Academy of Sciences, Beijing, 100049, China
4.Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
5.Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
6.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong
Recommended Citation
GB/T 7714
Liu N,Wang FF,Liu LQ,et al. Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials[J]. SCIENTIFIC REPORTS,2016,6:1-10.
APA Liu N.,Wang FF.,Liu LQ.,Yu HB.,Xie, Shaorong.,...&Li WJ.(2016).Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials.SCIENTIFIC REPORTS,6,1-10.
MLA Liu N,et al."Rapidly patterning micro/nano devices by directly assembling ions and nanomaterials".SCIENTIFIC REPORTS 6(2016):1-10.
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