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基于扫描微透镜的近场光学超分辨率成像系统研究
其他题名Scanning Microlens Based Near-field Super-resolution Microscopy
王飞飞1,2
导师李文荣 ; 刘连庆
分类号TH74
关键词微透镜 超分辨显微镜 近场白光干涉 大范围成像 微纳透镜阵列
索取号TH74/W32/2016
页数118页
学位专业机械电子工程
学位名称博士
2016-12-01
学位授予单位中国科学院沈阳自动化研究所
学位授予地点沈阳
作者部门机器人学研究室
摘要本文针对微透镜在大范围、三维超分辨成像中所面临的问题,结合微纳光学、机器人学和自动化技术,在理论分析的基础上开展了以下研究:(1) 超分辨成像机理:关于微透镜超分辨成像机理的解释一直存在争议。本文在系统研究微透镜成像特性的基础上,证明了倏逝波在微透镜超分辨成像中的作用,揭示了微透镜超分辨能力的来源。基于谱分析定量估计了微透镜分辨率并与实验所得分辨率具有很好的一致性,对成像机理进行了解释。以此为基础提出并解释了光照条件对微透镜分辨率的影响。 (2) 近场白光干涉三维超分辨成像:目前可以在三维上实现纳米形貌观测的方法主要局限于扫描探针显微镜。在对基于微透镜的近场白光干涉进行理论分析,深入研究基于微透镜所成超分辨实像与虚像的基础上,本文提供了另外一条实现三维超分辨成像的途径。(3) 大范围扫描成像:深入研究两种成像模式对微透镜与样品间距和相互作用力的控制,系统阐述白光荧光共成像模式,实现了大范围、高速、无损的超分辨扫描成像。(4) 微纳透镜阵列成像:提出两种通过调制界面不稳定来实现微纳结构/透镜制造方法,开展了相关理论和实验研究。在系统研究控制参量对所制造出的微纳透镜结构影响的基础上,实现了基于微透镜阵列的大范围成像。(5) 超分辨成像系统集成:在研究基于微透镜近场白光干涉三维超分辨成像、扫描超透镜大范围成像、白光荧光共成像的光路系统、机械系统和控制系统的基础上实现最终系统集成。本文通过对理论和相关使能技术的研究,为进一步提高微透镜超分辨成像能力和应用提供理论基础,拓展了微透镜超分辨成像技术的应用范围,为其真正走向实际应用提供了技术支持。
其他摘要Considering the problems existed in microlens based large-area imaging and three-dimentional imaging, the research work of this dissertation are based on the study of the combination of micro-/nano-optics, robotics and automation technologies, which are summarized as follows: (1) Super-resolution imaging mechanism. A debate regarding the fundamental imaging principle of “super-resolution” has been underway since the super-resolution capability of specific microspheres was first demonstrated. Based on the systematic study of imaging characteristics of microlens, we have experimentally demonstrated that the function of evanscent waves played in the sub-diffraction limited imaging of microlens. The interaction of these evanescent waves and samples is considered to play a role in the origin of the sub-diffraction-limited resolution of the microlens, which is further supported by the consistency between the theoretically estimated resolution by spectral analysis and the experimentally achieved values. We further report and demonstrate the enhancement of microlens-based imaging by adjusting the illumination conditions. (2) Near-field assisted white-light interferometry. Typically, except for scanning probe microscopy, few microscopy methods can achieve super-resolution imaging in all three dimensions. This dissertation presents another approach to realize three dimensional super-resolution imaging and studies the mechanism of near-field assisted white-light interferometry. It has also been demonstrated that this method can be realized by the microlens generated virtual or real images. (3) Large-area scanning imaging. This dissertation studys two kinds of imaging modes to achieve effective control of the spacing or interaction force between the microlens and sample. We also elaborate the simultaneous white-light and fluorescent imaging for large-area, high-speed, non-destructive super-resolution imaging. (4) Micro-/nano-lens array based imaging. Two methods are proposed to fabricate micro-/nano-structures by modulating interface instability. The basic physical model has been developed and related experimental studies have been conducted. The effects of the control parameters on the micro-/nano-lenses have been systematically investigated and large-area imaging has been demonstrated by using the microlens array. (5) Integration of super-resolution imaging system. Based on the study of ligth path, mechanical and control systems of near-field assisted white-light interferometry, scanning superlens microscopy and simultaneous white-light and fluorescent microscopy, we design and elaborate the integrated systems. In this dissertation, the theory and related enabling technologies are studied to provide theoretical basis for further enhancement of the super-resolution imaging capability and applications of microlenses. The application range of microlens super-resolution imaging technology is extended. It provides technical supports for its practical application.
语种中文
产权排序1
文献类型学位论文
条目标识符http://ir.sia.cn/handle/173321/19456
专题机器人学研究室
作者单位1.中国科学院沈阳自动化研究所
2.中国科学院大学
推荐引用方式
GB/T 7714
王飞飞. 基于扫描微透镜的近场光学超分辨率成像系统研究[D]. 沈阳. 中国科学院沈阳自动化研究所,2016.
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