Modeling, Design and Simulation of Micro-Force Sensor Based on PVDF

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	Modeling, Design and Simulation of Micro-Force Sensor Based on PVDF
	Liu YY(刘意杨); Liu L(刘浏); Xu ZC(徐增彩); Su XR(苏新瑞)
作者部门	智能检测与装备研究室
会议名称	6th International Conference on Manufacturing Science and Engineering (ICMSE)
会议日期	November 28-29, 2015
会议地点	Guangzhou, PEOPLES R CHINA
会议录名称	PROCEEDINGS OF THE 2015 6TH INTERNATIONAL CONFERENCE ON MANUFACTURING SCIENCE AND ENGINEERING
出版者	ATLANTIS PRESS
出版地	PARIS
	2015
页码	1319-1325
收录类别	CPCI（ISTP）
WOS记录号	WOS:000388457800241
产权排序	1
ISSN号	2352-5401
ISBN号	978-94-6252-137-7
关键词	Micro Force Sensor Micro Assembly Micromanipulation
摘要	At present, by existing sensors, sub-mu N micro-force in micro-assembly is not able to be reliably measured. In this paper, using PVDF film as the sensitive element and using micro-force sensor based on PVDF as the research object are to establish the model of PVDF sensor and analyze the relationship between output charge of PVDF and the force acting on it. Then to design the corresponding signal processing circuit, then simulate the circuit. Simulation results show design of the signal processing circuit is effective and modeling of PVDF sensor is correct. Thus, the paper provides a feasible solution in micro-force sensing and feedback control for micro-assembly and micro-manipulation.
语种	英语
引用统计
文献类型	会议论文
条目标识符	http://ir.sia.cn/handle/173321/19491
专题	智能检测与装备研究室
作者单位	1.Shenyang Institute of Automation, Chinese Academy of Sciences, Nanta St.114, Shenyang 110016, P. R. China 2.Northeastern University, Wenhua Road 3-11, Shenyang 110819 P. R. China
推荐引用方式 GB/T 7714	Liu YY,Liu L,Xu ZC,et al. Modeling, Design and Simulation of Micro-Force Sensor Based on PVDF[C]. PARIS:ATLANTIS PRESS,2015:1319-1325.

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