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A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨)
Department机器人学研究室
Conference Name2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
Conference DateOctober 9-14, 2016
Conference PlaceDaejeon, Korea
Source Publication2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
PublisherIEEE
Publication PlaceNew York
2016
Pages5193-5198
Indexed ByEI ; CPCI(ISTP)
EI Accession number20165203162160
WOS IDWOS:000391921705034
Contribution Rank1
ISBN978-1-5090-3763-6
Abstract

This paper proposed a phase-closed-loop nanomachining control method to realize the directly control of machining depth based on ultrasonic vibration-assisted AFM. By using applied force to control the machining depth, conventional AFM machining approaches unable to machining a nanostructure with specified machined depth. With the proposed method, the vibration phase of micro-cantilever has a specific relationship with machining depth. Therefore, the nano-grooves with desired depth can be machined by using phase value as feedback of PID control. In this paper, the theoretical analysis and simulation are carried out, and the experiments of phase-closed-loop control method are conducted. The experimental results verify the primary feasibility of the proposed method. The present method also demonstrates the potential on the fabrication of three-dimension nanostructures and nanoelectronic device.

Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/19564
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), Shenyang, 110016, China
2.University of the Chinese Academy of Sciences, Beijing, 100049, China
Recommended Citation
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM[C]. New York:IEEE,2016:5193-5198.
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