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A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨)
作者部门机器人学研究室
会议名称2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
会议日期October 9-14, 2016
会议地点Daejeon, Korea
会议录名称2016 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)
出版者IEEE
出版地New York
2016
页码5193-5198
收录类别EI ; CPCI(ISTP)
EI收录号20165203162160
WOS记录号WOS:000391921705034
产权排序1
ISBN号978-1-5090-3763-6
摘要

This paper proposed a phase-closed-loop nanomachining control method to realize the directly control of machining depth based on ultrasonic vibration-assisted AFM. By using applied force to control the machining depth, conventional AFM machining approaches unable to machining a nanostructure with specified machined depth. With the proposed method, the vibration phase of micro-cantilever has a specific relationship with machining depth. Therefore, the nano-grooves with desired depth can be machined by using phase value as feedback of PID control. In this paper, the theoretical analysis and simulation are carried out, and the experiments of phase-closed-loop control method are conducted. The experimental results verify the primary feasibility of the proposed method. The present method also demonstrates the potential on the fabrication of three-dimension nanostructures and nanoelectronic device.

语种英语
引用统计
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/19564
专题机器人学研究室
通讯作者Liu LQ(刘连庆)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), Shenyang, 110016, China
2.University of the Chinese Academy of Sciences, Beijing, 100049, China
推荐引用方式
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. A design of phase-closed-loop nanomachining control based ultrasonic vibration-assisted AFM[C]. New York:IEEE,2016:5193-5198.
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