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A thermally actuated polymer micro robotic gripper for manipulation of biological cells
Chan, Ho-Yin; Li WJ(李文荣)
Department机器人学研究室
Conference Name2003 IEEE International Conference on Robotics and Automation. Proceedings. ICRA '03
Conference DateSeptember 14-19, 2003
Conference PlaceTaipei, Taiwan
Author of SourceIEEE Robotics and Automation Society; National Science Council, Taiwan, R.O.C.; Ministry of Education, Taiwan, R.O.C.
Source PublicationProceedings - IEEE International Conference on Robotics and Automation
PublisherInstitute of Electrical and Electronics Engineers Inc.
2003
Pages288-293
Indexed ByEI ; CPCI(ISTP)
EI Accession number2003507776557
WOS IDWOS:000187419900047
Contribution Rank2
ISSN1050-4729
ISBN0-7803-7736-2
AbstractThe development of a novel polymer-based micro robotic gripper that can be actuated in a liquid medium is presented in this paper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by poly-para-xylylene C (parylene C) polymer layers. Due to the large difference of thermal expansion coefficients of the different layers, the actuator can be actuated with much large deflection than conventional MEMS actuators. We have developed actuators operating in liquid environment (e.g., DI water) with only 3V at ∼33mA input to achieve full deflection (90° change of tip direction). The actuators were also observed to respond to 3Hz square wave input in water with no visible delay. The temperature of the actuators at full deflection was estimated to be about 60°C, which is much lower than the typical requirement of >100°C to actuate other conventional MEMS actuators. Actuators with dimensions of ∼2mmx100μmx0.6μm were used to capture Danio rerio follicles (∼800μm average cell diameter) in water. The design, fabrication process, and experimental results for these actuators are presented in this paper.
Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/19998
Collection机器人学研究室
Corresponding AuthorLi WJ(李文荣)
Affiliation1.Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong
2.Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
Recommended Citation
GB/T 7714
Chan, Ho-Yin,Li WJ. A thermally actuated polymer micro robotic gripper for manipulation of biological cells[C]//IEEE Robotics and Automation Society; National Science Council, Taiwan, R.O.C.; Ministry of Education, Taiwan, R.O.C.:Institute of Electrical and Electronics Engineers Inc.,2003:288-293.
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