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A thermally actuated polymer micro robotic gripper for manipulation of biological cells
Chan, Ho-Yin; Li WJ(李文荣)
作者部门机器人学研究室
会议名称2003 IEEE International Conference on Robotics and Automation. Proceedings. ICRA '03
会议日期September 14-19, 2003
会议地点Taipei, Taiwan
会议主办者IEEE Robotics and Automation Society; National Science Council, Taiwan, R.O.C.; Ministry of Education, Taiwan, R.O.C.
会议录名称Proceedings - IEEE International Conference on Robotics and Automation
出版者Institute of Electrical and Electronics Engineers Inc.
2003
页码288-293
收录类别EI ; CPCI(ISTP)
EI收录号2003507776557
WOS记录号WOS:000187419900047
产权排序2
ISSN号1050-4729
ISBN号0-7803-7736-2
摘要The development of a novel polymer-based micro robotic gripper that can be actuated in a liquid medium is presented in this paper. The basic structure for the gripper is a trimorph thermal actuator with a platinum metal heater encapsulated by poly-para-xylylene C (parylene C) polymer layers. Due to the large difference of thermal expansion coefficients of the different layers, the actuator can be actuated with much large deflection than conventional MEMS actuators. We have developed actuators operating in liquid environment (e.g., DI water) with only 3V at ∼33mA input to achieve full deflection (90° change of tip direction). The actuators were also observed to respond to 3Hz square wave input in water with no visible delay. The temperature of the actuators at full deflection was estimated to be about 60°C, which is much lower than the typical requirement of >100°C to actuate other conventional MEMS actuators. Actuators with dimensions of ∼2mmx100μmx0.6μm were used to capture Danio rerio follicles (∼800μm average cell diameter) in water. The design, fabrication process, and experimental results for these actuators are presented in this paper.
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/19998
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.Centre for Micro and Nano Systems, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong
2.Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
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Chan, Ho-Yin,Li WJ. A thermally actuated polymer micro robotic gripper for manipulation of biological cells[C]//IEEE Robotics and Automation Society; National Science Council, Taiwan, R.O.C.; Ministry of Education, Taiwan, R.O.C.:Institute of Electrical and Electronics Engineers Inc.,2003:288-293.
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