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Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation
Lai, King W. C.; Fung, Carmen K. M.; Qu, Selina C.; Lei, K.F.; Li WJ(李文荣)
作者部门机器人学研究室
会议名称IEEE International Conference on Robotics and Biomimetics (ROBIO 2004)
会议日期August 22-26, 2004
会议地点Shenyang, China
会议主办者IEEE Robot & Automat Soc, IEEE HK RA CS Joint Chapter, Chinese Acad Sci, Shenyang Inst Automat, Chinese High tech Dev Program, Robot Soc Japan, Japan Soc Mech Engineers, Int Rescue Syst Inst, Shenyang Hunnan New Urban Area, Shenyang New & High tech Ind Dev Zone
会议录名称IEEE ROBIO 2004: Proceedings of the IEEE International Conference on Robotics and Biomimetics
出版者IEEE
出版地NEW YORK
2004
页码634-639
收录类别EI ; CPCI(ISTP)
EI收录号2005499531994
WOS记录号WOS:000234343000113
产权排序2
ISBN号0-7803-8641-8
关键词Ac Electrophoretic Manipulation Carbon Nanotube Cnt Sensors Microinjection Nano Batch Fabrication
摘要We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20008
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.Chinese University, Hong Kong, Hong Kong
3.Shenyang Institute of Automation
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Lai, King W. C.,Fung, Carmen K. M.,Qu, Selina C.,et al. Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation[C]//IEEE Robot & Automat Soc, IEEE HK RA CS Joint Chapter, Chinese Acad Sci, Shenyang Inst Automat, Chinese High tech Dev Program, Robot Soc Japan, Japan Soc Mech Engineers, Int Rescue Syst Inst, Shenyang Hunnan New Urban Area, Shenyang New & High tech Ind Dev Zone. NEW YORK:IEEE,2004:634-639.
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