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Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method
Mou L(缪磊); Dong ZL(董再励); Chan, Hoyin
作者部门机器人学研究室
会议名称5th World Congress on Intelligent Control and Automation
会议日期June 15-19, 2004
会议地点Hangzhou, China
会议主办者Zhejiang University; National Laboratory of Industrial Control Technology; Zhejiang University of Technology
会议录名称Proceedings of the World Congress on Intelligent Control and Automation (WCICA)
出版者IEEE
出版地NEW YORK
2004
页码3800-3804
收录类别EI
EI收录号2004388367701
产权排序1
摘要With the maturing design of micro electrical mechanism systems, the metrology for MEMS is becoming the hot research in the micro system technology. In this paper, we used the sum-modified-Laplacian (SML) focus measure and depth estimation method to measure the tip deflection of a thermally actuated polymer micro robotic actuator. Twenty-three under-water images of the micro actuator working at the temperature of 42°C have been used to illustrate the idea of measuring the tip deflection using optical focusing method. The results showed in the paper can be used to metrology MEMS. By optical focus method, we can measure the tip defection, which can act as a feedback input to the actuator. So, an accurate control of the motion of actuator can be achieved.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20011
专题机器人学研究室
作者单位1.Postgraduate School, Chinese Academy of Science, 110039
2.Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Science, 110016
3.Center for Micro and Nano Systems, Chinese University of Hongkong, Shatin, N.T., Hong Kong
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Mou L,Dong ZL,Chan, Hoyin. Displacement measurement of a thermally actuated polymer micro robotic gripper using the optical focus method[C]//Zhejiang University; National Laboratory of Industrial Control Technology; Zhejiang University of Technology. NEW YORK:IEEE,2004:3800-3804.
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