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Fabrication of high-aspect-ratio micro pipettes and fiber probes by sacrificial boundary etch process
Lai, King W. C.; Li WJ(李文荣); Lai, K.W.C.
作者部门机器人学研究室
会议名称13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
会议日期June 5-9, 2005
会议地点Seoul, Korea
会议主办者Korean Sensors Society; IEEE Electron Devices Society, EDS; IEE of Japan, Sensors and Micromachines Society; International Federation of Automatic Control; Institute of Control, Automation and Systems Engineers
会议录名称International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
出版者IEEE
出版地NEW YORK
2005
页码1501-1504
收录类别EI ; CPCI(ISTP)
EI收录号2005459462802
WOS记录号WOS:000232189100370
产权排序2
ISBN号978-0-7803-8994-6
关键词Kwong-li’s Method Micro/nano Pipette Micromano Injection Sacrificial Boundary Etching
摘要This paper presents a novel fabrication process to realize high-aspect-ratio micro pipettes and fiber probes which can be used for biological applications. The basic fabrication process employs hydrofluoric acid (HF) to etch the outer layer of the end of capillary tubes and optical fibers as previously reported by other researchers. However, we invented a "sacrificial boundary etching" technique that can be used to shape micron size tubes and fibers into sharp pipettes or probe tips with controllable tip angle. The tip profile and the length of its taper can be controlled by the initial height of the HF inside a glass tube, which is used as a sacrificial material in shaping the tip profile. Our experimental results showed that capillary tubes and optical fibers can be sharpen into tips with angle as small as 2.1° and with tip diameter of ranging from 300 nm to 5 μm (the initial tube and fiber diameter being 125 μm). If the aspect-ratio (AR) of a pipette is defined as the ratio between the length of its taper distance and the length of its base diameter, the AR for our fabricated pipette can be as high as 10. We also conducted experiments by using the fabricated pipettes to perform microinjection of fluid into cells and fluid ejection to substrates for potential micro-spotting applications.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20012
专题机器人学研究室
通讯作者Lai, K.W.C.
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Shatin, N.T., Hong Kong
2.Chinese University of Hong Kong
3.Shenyang Institute of Automation
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Lai, King W. C.,Li WJ,Lai, K.W.C.. Fabrication of high-aspect-ratio micro pipettes and fiber probes by sacrificial boundary etch process[C]//Korean Sensors Society; IEEE Electron Devices Society, EDS; IEE of Japan, Sensors and Micromachines Society; International Federation of Automatic Control; Institute of Control, Automation and Systems Engineers. NEW YORK:IEEE,2005:1501-1504.
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