SIA OpenIR  > 机器人学研究室
Fabrication of high-aspect-ratio micro pipettes and fiber probes by sacrificial boundary etch process
Lai, King W. C.; Li WJ(李文荣); Lai, K.W.C.
Department机器人学研究室
Conference Name13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Conference DateJune 5-9, 2005
Conference PlaceSeoul, Korea
Author of SourceKorean Sensors Society; IEEE Electron Devices Society, EDS; IEE of Japan, Sensors and Micromachines Society; International Federation of Automatic Control; Institute of Control, Automation and Systems Engineers
Source PublicationInternational Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
PublisherIEEE
Publication PlaceNEW YORK
2005
Pages1501-1504
Indexed ByEI ; CPCI(ISTP)
EI Accession number2005459462802
WOS IDWOS:000232189100370
Contribution Rank2
ISBN978-0-7803-8994-6
KeywordKwong-li’s Method Micro/nano Pipette Micromano Injection Sacrificial Boundary Etching
AbstractThis paper presents a novel fabrication process to realize high-aspect-ratio micro pipettes and fiber probes which can be used for biological applications. The basic fabrication process employs hydrofluoric acid (HF) to etch the outer layer of the end of capillary tubes and optical fibers as previously reported by other researchers. However, we invented a "sacrificial boundary etching" technique that can be used to shape micron size tubes and fibers into sharp pipettes or probe tips with controllable tip angle. The tip profile and the length of its taper can be controlled by the initial height of the HF inside a glass tube, which is used as a sacrificial material in shaping the tip profile. Our experimental results showed that capillary tubes and optical fibers can be sharpen into tips with angle as small as 2.1° and with tip diameter of ranging from 300 nm to 5 μm (the initial tube and fiber diameter being 125 μm). If the aspect-ratio (AR) of a pipette is defined as the ratio between the length of its taper distance and the length of its base diameter, the AR for our fabricated pipette can be as high as 10. We also conducted experiments by using the fabricated pipettes to perform microinjection of fluid into cells and fluid ejection to substrates for potential micro-spotting applications.
Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/20012
Collection机器人学研究室
Corresponding AuthorLai, K.W.C.
Affiliation1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Shatin, N.T., Hong Kong
2.Chinese University of Hong Kong
3.Shenyang Institute of Automation
Recommended Citation
GB/T 7714
Lai, King W. C.,Li WJ,Lai, K.W.C.. Fabrication of high-aspect-ratio micro pipettes and fiber probes by sacrificial boundary etch process[C]//Korean Sensors Society; IEEE Electron Devices Society, EDS; IEE of Japan, Sensors and Micromachines Society; International Federation of Automatic Control; Institute of Control, Automation and Systems Engineers. NEW YORK:IEEE,2005:1501-1504.
Files in This Item:
File Name/Size DocType Version Access License
Fabrication of high-(773KB)会议论文 开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Lai, King W. C.]'s Articles
[Li WJ(李文荣)]'s Articles
[Lai, K.W.C.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Lai, King W. C.]'s Articles
[Li WJ(李文荣)]'s Articles
[Lai, K.W.C.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Lai, King W. C.]'s Articles
[Li WJ(李文荣)]'s Articles
[Lai, K.W.C.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Fabrication of high-aspect-ratio micro pipettes and fiber probes by sacrificial boundary etch process.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.