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Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly
Fung, Carmen K. M.; Zhang, Maggie Q. H.; Dong ZL(董再励); Li WJ(李文荣)
作者部门机器人学研究室
会议名称2005 5th IEEE Conference on Nanotechnology
会议日期July 11, 2005 - July 15, 2005
会议地点Nagoya, Japan
会议录名称2005 5th IEEE Conference on Nanotechnology
出版者IEEE Computer Society
出版地Piscataway, NJ, USA
2005
页码369-372
收录类别EI
EI收录号20063310065811
产权排序2
ISBN号978-0-7803-9199-4
摘要This paper reports the fabrication technique of a novel carbon nanotubes (CNTs) based MEMS pressure sensor with piezoresistive gauge factor potentially much greater than polysilicon based sensors. By using the dielectrophoretic (DEP) nanoassembly of CNTs and a MEMS-compatible process, we have successfully integrated bundled strands of CNT sensing elements on arrays of Polymethylmethacrylate (PMMA) diaphragms. The piezoresistive effects of CNT were preliminarily investigated by measuring the pressure-resistance dependency of the sensors and preliminary results indicated that the CNT-based micro sensors were capable of sensing input pressure variations. Moreover, the mechanical properties of the diaphragms were studied experimentally and theoretically, which showed the deflection and strain distribution of the diaphragms with different input pressures, in order to conclusively determine the piezoresistivity of bundled CNTs. Based on these experimental evidences, we propose that carbon nanotubes is a novel material for fabricating micro pressure sensors on polymer substrates - which may serve as alternative sensors for silicon based pressure sensors when bio-compatibility and low-cost applications are required.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20016
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
3.Chinese University of Hong Kong
4.Chinese Academy of Sciences
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GB/T 7714
Fung, Carmen K. M.,Zhang, Maggie Q. H.,Dong ZL,et al. Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly[C]. Piscataway, NJ, USA:IEEE Computer Society,2005:369-372.
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