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Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
Li WJ(李文荣); Xi N(席宁)
作者部门机器人学研究室
会议名称2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
会议日期October 22-25, 2006
会议地点Gyeongju, Korea, Republic of
会议录名称2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
出版者IEEE Computer Society
出版地Piscataway, NJ, USA
2006
页码108-109
收录类别EI ; CPCI(ISTP)
EI收录号20083611504382
WOS记录号WOS:000254409500014
产权排序1
ISBN号978-1-4244-0540-4
关键词Cnt Sensors Dep Manipulation Micro-robotics Nano-sensor Arrays
摘要Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20019
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.Robotics and Automation Laboratory, Michigan State University, United States
3.Shenyang Institute of Automation, Chinese Academy of Sciences, China
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Li WJ,Xi N. Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies[C]. Piscataway, NJ, USA:IEEE Computer Society,2006:108-109.
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