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Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs
Chow, Winnie W. Y.; Wong, Man Keung; Li WJ(李文荣); Wong, Ka Wai
Department机器人学研究室
Conference Name2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Conference DateJanuary 16, 2007 - January 19, 2007
Conference PlaceBangkok, Thailand
Source PublicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
PublisherIEEE Computer Society
Publication PlacePiscataway, NJ, USA
2007
Pages507-510
Indexed ByEI ; CPCI(ISTP)
EI Accession number20073510788098
WOS IDWOS:000248619100048
Contribution Rank3
ISBN978-1-4244-0610-4
KeywordCarbon Nanotubes Electro-chemical Deposition
AbstractWe present a novel fabrication technique to fabricate functionalized CNT sensors rapidly using electro-chemical deposition method. The basic fabrication process of this sensor includes fabrication of a gold (Au) microelectrode array by photolithography process, functionalization of multi-walled carbon nanotubes (MWNTs) with carboxylic acid groups (-COOH), and electro-chemical deposition of functionalized MWNTs (f-CNTs) on the Au microelectrode array. The adhesion between the f-CNTs and the Au microelectrodes could be enhanced if CNT sensors are built using the process described in this paper. The I-V characteristics of the sensors were investigated. Our experimental results show that CNT sensors fabricated by electro-chemical process have dramatically different I-V characteristics compared with sensors fabricated by DEP or AFM manipulation techniques. The power limit of the sensors ranges from 0.28mW to 6.21mW, which is much higher than most reported CNT sensors. Self-heating effect can be induced at input power of ∼2.2mW. Based on these experimental results, we think that the novel f-CNT sensors should be investigated further for applications in thermal, mechanical, and biomedical systems.
Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/20021
Collection机器人学研究室
Corresponding AuthorLi WJ(李文荣)
Affiliation1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.Department of Physics, Chinese University of Hong Kong, Hong Kong, Hong Kong
3.Shenyang Institute of Automation Chinese Academy of Sciences
Recommended Citation
GB/T 7714
Chow, Winnie W. Y.,Wong, Man Keung,Li WJ,et al. Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs[C]. Piscataway, NJ, USA:IEEE Computer Society,2007:507-510.
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