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Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs
Chow, Winnie W. Y.; Wong, Man Keung; Li WJ(李文荣); Wong, Ka Wai
作者部门机器人学研究室
会议名称2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
会议日期January 16, 2007 - January 19, 2007
会议地点Bangkok, Thailand
会议录名称Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
出版者IEEE Computer Society
出版地Piscataway, NJ, USA
2007
页码507-510
收录类别EI ; CPCI(ISTP)
EI收录号20073510788098
WOS记录号WOS:000248619100048
产权排序3
ISBN号978-1-4244-0610-4
关键词Carbon Nanotubes Electro-chemical Deposition
摘要We present a novel fabrication technique to fabricate functionalized CNT sensors rapidly using electro-chemical deposition method. The basic fabrication process of this sensor includes fabrication of a gold (Au) microelectrode array by photolithography process, functionalization of multi-walled carbon nanotubes (MWNTs) with carboxylic acid groups (-COOH), and electro-chemical deposition of functionalized MWNTs (f-CNTs) on the Au microelectrode array. The adhesion between the f-CNTs and the Au microelectrodes could be enhanced if CNT sensors are built using the process described in this paper. The I-V characteristics of the sensors were investigated. Our experimental results show that CNT sensors fabricated by electro-chemical process have dramatically different I-V characteristics compared with sensors fabricated by DEP or AFM manipulation techniques. The power limit of the sensors ranges from 0.28mW to 6.21mW, which is much higher than most reported CNT sensors. Self-heating effect can be induced at input power of ∼2.2mW. Based on these experimental results, we think that the novel f-CNT sensors should be investigated further for applications in thermal, mechanical, and biomedical systems.
语种英语
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文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20021
专题机器人学研究室
通讯作者Li WJ(李文荣)
作者单位1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong
2.Department of Physics, Chinese University of Hong Kong, Hong Kong, Hong Kong
3.Shenyang Institute of Automation Chinese Academy of Sciences
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GB/T 7714
Chow, Winnie W. Y.,Wong, Man Keung,Li WJ,et al. Rapid fabrication of CNT sensors using electro-chemical deposition of functionalized CNTs[C]. Piscataway, NJ, USA:IEEE Computer Society,2007:507-510.
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