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Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology
Chi PC(迟鹏程); Zhang WP(张卫平); Chen WY(陈文元); Li HY(李洪谊); Meng K(孟坤)
作者部门机器人学研究室
会议名称2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
会议日期July 29-31, 2011
会议地点Sanya, China
会议录名称Advanced Materials Research
出版者Trans Tech Publications Ltd
出版地Clausthal-Zellerfeld, Germany
2011
页码3135-3138
收录类别EI ; CPCI(ISTP)
EI收录号20113214223104
WOS记录号WOS:000302382701274
产权排序2
ISSN号1022-6680
ISBN号978-3-03785-193-7
关键词Mechanical Microrobot Mems Technology
摘要This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.
语种英语
引用统计
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20064
专题机器人学研究室
通讯作者Zhang WP(张卫平)
作者单位1.National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Technology, Shanghai Jiao Tong University, Shanghai 200030, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
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GB/T 7714
Chi PC,Zhang WP,Chen WY,et al. Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology[C]. Clausthal-Zellerfeld, Germany:Trans Tech Publications Ltd,2011:3135-3138.
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