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Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology
Chi PC(迟鹏程); Zhang WP(张卫平); Chen WY(陈文元); Li HY(李洪谊); Meng K(孟坤)
作者部门机器人学研究室
会议名称2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
会议日期July 29-31, 2011
会议地点Sanya, China
会议录名称Advanced Materials Research
出版者Trans Tech Publications Ltd
出版地Clausthal-Zellerfeld, Germany
2011
页码3135-3138
收录类别EI ; CPCI(ISTP)
EI收录号20113214223104
WOS记录号WOS:000302382701274
产权排序2
ISSN号1022-6680
ISBN号978-3-03785-193-7
关键词Mechanical Microrobot Mems Technology
摘要This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.
语种英语
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被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/20064
专题机器人学研究室
通讯作者Zhang WP(张卫平)
作者单位1.National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Technology, Shanghai Jiao Tong University, Shanghai 200030, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
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Chi PC,Zhang WP,Chen WY,et al. Design, fabrication and analysis of microrobotic insect wings and thorax with different materials by MEMS technology[C]. Clausthal-Zellerfeld, Germany:Trans Tech Publications Ltd,2011:3135-3138.
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