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Design and Analysis of a Mutual Inductance Coupling-Based MicroDeformation Sensor
Zhang RM(张如美); Liu H(刘浩); Zhou YY(周圆圆); Yang ZD(杨臻达); Han JD(韩建达)
Indexed BySCI ; EI
EI Accession number20170703350377
WOS IDWOS:000396397900024
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China under Grant 61473281 ; Natural Science Foundation of Liaoning Province under Grant 201602744 ; Self-plan Project of State Key Laboratory of Robotics under Grant 2016-Z06
KeywordDeformation Measurement Electromagnetic Sensor Inductive Coupling Lock-in Amplification Mutual Inductance

Mutual inductance coupling-based electromagnetic sensors utilize the quasi-static or dynamic magnetic excitation and sensing signals to detect the multiaxis deformation. The compact size and high sensitivity allow their application in tiny and precise measurement systems, such as space-confined minimally invasive surgery. Until now, however, there has not been any theoretical derivation of the relationship between microdeformation and obtained electromagnetic signals yet. To address this problem, this paper presents a triaxial deformation sensor with corresponding measurement electronics based on lock-in technique to pick up the sensing signals for deformation reconstruction. Simulations and experiments were carried out to explore the relationship between mutual inductance and triaxial deformation, including longitudinal compression from 3 to 4.8 mm, inclination angle from -20 degrees to 20 degrees, and orientation angle from 0 degrees to 360 degrees. The results indicate that the orientation angle beta can be expressed in terms of arctan function of the mutual inductance and longitudinal compression rho can be achieved through polynomial fitting method. The inclination angle alpha shows a linearity with the mutual inductance components along alpha direction when rho is fixed, and the linear coefficient changes with rho. Finally, the deformation was reconstructed with the average errors of 0.00037 mm, 0.9199 degrees, and 0.000026 degrees and the corresponding root-mean-square errors of 0.0144 mm, 1.3608 degrees, and 0.1356 degrees for rho, beta, and alpha, respectively. The reconstruction algorithms and measurement circuit will promote the application of microtriaxial deformation sensors in high precision displacement measurement and multiaxis force sensing systems.

WOS HeadingsScience & Technology ; Technology
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
WOS KeywordCoils ; Position ; Force ; Axes ; Air
WOS Research AreaEngineering ; Instruments & Instrumentation
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Document Type期刊论文
Corresponding AuthorLiu H(刘浩)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Zhang RM,Liu H,Zhou YY,et al. Design and Analysis of a Mutual Inductance Coupling-Based MicroDeformation Sensor[J]. IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2017,66(4):821-829.
APA Zhang RM,Liu H,Zhou YY,Yang ZD,&Han JD.(2017).Design and Analysis of a Mutual Inductance Coupling-Based MicroDeformation Sensor.IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,66(4),821-829.
MLA Zhang RM,et al."Design and Analysis of a Mutual Inductance Coupling-Based MicroDeformation Sensor".IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT 66.4(2017):821-829.
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