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Laser-nanomachining by microsphere induced photonic nanojet
Wen YD(文扬东); Wang FF(王飞飞); Yu HB(于海波); Li P(李盼); Liu LQ(刘连庆); Li WJ(李文荣)
作者部门机器人学研究室
关键词Laser-nanomachining Photonic Nanojet
发表期刊Sensors and Actuators, A: Physical
ISSN0924-4247
2017
卷号258页码:115-122
收录类别SCI ; EI
EI收录号20171203476732
WOS记录号WOS:000400718200015
产权排序1
资助机构National Natural ScienceFoundation of China (Project No. 61475183), the NSFC/RGC JointResearch Scheme (Project No. 51461165501 and N CityU132/14),CityU Internal Grant (Project No. 7004073), the External Coop-eration Program of Chinese Academy of Sciences (Grant No.173321KYSB20130006), and the CAS-FEA International PartnershipProgram for Creative Research Teams
摘要The photonic nanojet generated by microsphere-based modulation of incident light has attracted much research attention in recent years because its full width at half maximum (FWHM) is less than the optical diffraction limit, which enables the microsphere to serve as a superlens to achieve super-resolution imaging. In addition to its sub-diffraction limited FWHM, the intensity of the photonic nanojet is also enhanced by several times that of the incident light. Here, we report sub-micrometer features that can be fabricated on MEMS-related materials by simply using a laser-induced photonic nanojet through microspheres. The influences of the diameter of silica microspheres and the initial power of laser beams on “nano-drilling” cavities on substrates were experimentally studied. Compared to the experiments without the microspheres, the resolution of the laser-micromachined structures was markedly improved using our approach. We have shown that it is possible to use a laser beam with initial beam width of 5 μm to fabricate 250 nm diameter cavities on silica substrates. We further simulated the photonic nanojet created by silica microspheres using the finite-difference time-domain (FDTD) computational technique to gain insights into the physical mechanisms of the photonic nanojet and its influence on the final nano-drilling results. This photonic nanojet-based nano-drilling method presents new opportunities for low-cost, high-throughput fabrication of nanoscale devices in the future.
语种英语
WOS标题词Science & Technology ; Technology
WOS类目Engineering, Electrical & Electronic ; Instruments & Instrumentation
关键词[WOS]532 NM LASER ; LIGHT ; NANOPARTICLES ; LITHOGRAPHY ; FABRICATION
WOS研究方向Engineering ; Instruments & Instrumentation
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/20292
专题机器人学研究室
通讯作者Liu LQ(刘连庆); Li WJ(李文荣)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong
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GB/T 7714
Wen YD,Wang FF,Yu HB,et al. Laser-nanomachining by microsphere induced photonic nanojet[J]. Sensors and Actuators, A: Physical,2017,258:115-122.
APA Wen YD,Wang FF,Yu HB,Li P,Liu LQ,&Li WJ.(2017).Laser-nanomachining by microsphere induced photonic nanojet.Sensors and Actuators, A: Physical,258,115-122.
MLA Wen YD,et al."Laser-nanomachining by microsphere induced photonic nanojet".Sensors and Actuators, A: Physical 258(2017):115-122.
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