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Phase shifting-based debris effect detection in USV-assisted AFM nanomachining
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨); Li GY(李广勇)
作者部门机器人学研究室
关键词Atomic Force Microscopy (Afm) Nanomachining Ultrasonic Vibration Thin-film
发表期刊Applied Surface Science
ISSN0169-4332
2017
卷号413页码:317-326
收录类别SCI ; EI
EI收录号20171603578233
WOS记录号WOS:000401680200037
产权排序1
资助机构National Natural Science Foun-dation of China [grant numbers 61522312, 61433017] and the CAS FEA International Partnership Program for Creative Research Teams.
摘要Atomic force microscopy (AFM) mechanical-based lithography attracts much attention in nanomanufacturing due to its advantages of low cost, high precision and high resolution. However, debris effects during mechanical lithography often lead to an unstable machining process and inaccurate results, which limits further applications of AFM-based lithography. There is a lack of a real-time debris detection approach, which is the prerequisite to eventually eliminating the influence of the debris, and of a method that can solve the above problems well. The ultrasonic vibration (USV)-assisted AFM has the ability to sense the machining depth in real time by detecting the phase shifting of cantilever. However, whether the pile-up of debris affect the phase response of cantilever is still lack of investigation. Therefore, we analyzed the mechanism of the debris effect on force control mode and investigated the relationship between phase shifting and pile-up of debris. Theoretical analysis and experimental results reveal that the pile-up of debris have negligible effect on phase shifting of cantilever. Therefore, the phase shifting-based method can detect the debris effect on machining depth in force control mode of AFM machining.
语种英语
WOS标题词Science & Technology ; Physical Sciences ; Technology
WOS类目Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
关键词[WOS]ATOMIC-FORCE MICROSCOPE ; LIFT-OFF PROCESS ; ABRASIVE WEAR ; LITHOGRAPHY ; NANOLITHOGRAPHY ; SURFACE ; NANOFABRICATION ; POLYSTYRENE ; FABRICATION ; NANOSCALE
WOS研究方向Chemistry ; Materials Science ; Physics
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/20370
专题机器人学研究室
通讯作者Liu LQ(刘连庆)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), Shenyang, Liaoning, 110016, China
2.University of the Chinese Academy of Sciences, Beijing 100049, China
3.Beijing Advanced Innovation Center for Imaging Technology, Capital Normal University, Beijing 100049, China
4.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15213, United States
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GB/T 7714
Shi JL,Liu LQ,Yu P,et al. Phase shifting-based debris effect detection in USV-assisted AFM nanomachining[J]. Applied Surface Science,2017,413:317-326.
APA Shi JL,Liu LQ,Yu P,Cong Y,&Li GY.(2017).Phase shifting-based debris effect detection in USV-assisted AFM nanomachining.Applied Surface Science,413,317-326.
MLA Shi JL,et al."Phase shifting-based debris effect detection in USV-assisted AFM nanomachining".Applied Surface Science 413(2017):317-326.
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