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一种面向半导体工艺设备的故障诊断方法
于淼; 廖柯; 段彬; 里鹏; 胡国良
Department数字工厂研究室
Rights Holder中国科学院沈阳自动化研究所
Patent Agent沈阳科苑专利商标代理有限公司 21002
Country中国
Subtype发明
Status实审 权利转移
Abstract本发明公开了一种面向半导体工艺设备的故障诊断方法,首先建立包括模糊规则库、推理机的专家系统;进一步的,针对半导体工艺设备实时监测参数进行模糊化处理,生成模糊事实;推理机基于模糊事实,通过与模糊规则库的交互来进行模糊推理,生成故障诊断结果;基于故障诊断结果的实际应用情况,进行面向模糊规则库的规则强度自学习修正。本发明基于rete算法进行模糊推理进而得出故障诊断结果,并充分结合实际故障诊断应用情况来进行模糊规则库的规则强度自学习修正,提高了半导体工艺设备故障诊断的精准水平和自动化水平,保障了半导体工艺的高效稳定运行。
PCT Attributes
Application Date2017-03-20
2017-07-04
Application NumberCN201710166248.9
Open (Notice) NumberCN106919982A
Language中文
Contribution Rank1
Document Type专利
Identifierhttp://ir.sia.cn/handle/173321/20590
Collection数字工厂研究室
Affiliation中国科学院沈阳自动化研究所
Recommended Citation
GB/T 7714
于淼,廖柯,段彬,等. 一种面向半导体工艺设备的故障诊断方法[P]. 2017-07-04.
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