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Phase mode nanomachining on ultra-thin films with atomic force microscopy
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Li GY(李广勇)
作者部门机器人学研究室
关键词Atomic Force Microscopy Thin Films Wear And Tribology
发表期刊Materials Letters
ISSN0167-577X
2017
卷号209页码:437-440
收录类别SCI ; EI
EI收录号20173404073812
WOS记录号WOS:000413124300112
产权排序1
资助机构National Natural Science Foundation of China (Grant Nos. U1613220, 61522312 and 61375107).
摘要Machining or patterning ultra-thin films with specified structures are critical challenges. In this work, a novel mode of atomic force microscopy nanomachining is proposed. The phase response of the cantilever is used as the input of feedback control to modulate the machining force to achieve the desired machined depth. The proposed phase mode, overcoming the disadvantages of force mode, is not affected by the debris piled-up and has the ability to sense the interface of an ultra-thin film and predict the machining depth without post-imaging. The effectiveness of the phase mode has been proven by experiments.
语种英语
WOS标题词Science & Technology ; Technology ; Physical Sciences
WOS类目Materials Science, Multidisciplinary ; Physics, Applied
关键词[WOS]DAMAGE
WOS研究方向Materials Science ; Physics
引用统计
被引频次:1[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/20843
专题机器人学研究室
通讯作者Liu LQ(刘连庆)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15261, United States
推荐引用方式
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. Phase mode nanomachining on ultra-thin films with atomic force microscopy[J]. Materials Letters,2017,209:437-440.
APA Shi JL,Liu LQ,Yu P,&Li GY.(2017).Phase mode nanomachining on ultra-thin films with atomic force microscopy.Materials Letters,209,437-440.
MLA Shi JL,et al."Phase mode nanomachining on ultra-thin films with atomic force microscopy".Materials Letters 209(2017):437-440.
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