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Phase mode nanomachining on ultra-thin films with atomic force microscopy
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Li GY(李广勇)
Department机器人学研究室
Source PublicationMaterials Letters
ISSN0167-577X
2017
Volume209Pages:437-440
Indexed BySCI ; EI
EI Accession number20173404073812
WOS IDWOS:000413124300112
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China (Grant Nos. U1613220, 61522312 and 61375107).
KeywordAtomic Force Microscopy Thin Films Wear And Tribology
AbstractMachining or patterning ultra-thin films with specified structures are critical challenges. In this work, a novel mode of atomic force microscopy nanomachining is proposed. The phase response of the cantilever is used as the input of feedback control to modulate the machining force to achieve the desired machined depth. The proposed phase mode, overcoming the disadvantages of force mode, is not affected by the debris piled-up and has the ability to sense the interface of an ultra-thin film and predict the machining depth without post-imaging. The effectiveness of the phase mode has been proven by experiments.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectMaterials Science, Multidisciplinary ; Physics, Applied
WOS KeywordDAMAGE
WOS Research AreaMaterials Science ; Physics
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/20843
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Electrical and Computer Engineering, University of Pittsburgh, Pittsburgh, PA, 15261, United States
Recommended Citation
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. Phase mode nanomachining on ultra-thin films with atomic force microscopy[J]. Materials Letters,2017,209:437-440.
APA Shi JL,Liu LQ,Yu P,&Li GY.(2017).Phase mode nanomachining on ultra-thin films with atomic force microscopy.Materials Letters,209,437-440.
MLA Shi JL,et al."Phase mode nanomachining on ultra-thin films with atomic force microscopy".Materials Letters 209(2017):437-440.
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