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Hardness determination at nanoscale by ultrasonic vibration-assisted AFM
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨)
作者部门机器人学研究室
会议名称1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017
会议日期July 17-21, 2017
会议地点Montreal, Canada
会议录名称International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings
出版者IEEE
出版地New York
2017
页码1-5
收录类别EI
EI收录号20174004233957
产权排序1
ISBN号978-1-5386-0346-8
关键词Atomic Force Microscopy Nanomachining Thin Film Mechanical Properties
摘要Mechanical properties at nanoscale are crucial fators in the applications such as nanoscale interconnects and active components in electronic, optoelectronic, and electromechanical devices. Determination of the hardness of nanostructures, especially nano-thin-film, with regime from several to hundreds nanometers is a challenge. In this study, we proposed an ultrasonic vibration (USV)-assisted atomic force microscopy (AFM) method to measure the hardness of bulk materials and nano-thin-film with the thickness of 25 and hundreds nanometers. The hardness properties of material can be detected by the cantilever phase response in the USV machining process. By recording the depth-phase data, the hardness information can be extracted through fitting the data by the mathematical model. The theoretical analysis and experimental results valid the proposed method.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/21073
专题机器人学研究室
通讯作者Liu LQ(刘连庆)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China
2.University of Chinese Academy of Sciences, Beijing, 100049, China
推荐引用方式
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. Hardness determination at nanoscale by ultrasonic vibration-assisted AFM[C]. New York:IEEE,2017:1-5.
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