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Hardness determination at nanoscale by ultrasonic vibration-assisted AFM
Shi JL(施佳林); Liu LQ(刘连庆); Yu P(于鹏); Cong Y(丛杨)
Department机器人学研究室
Conference Name1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017
Conference DateJuly 17-21, 2017
Conference PlaceMontreal, Canada
Source PublicationInternational Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings
PublisherIEEE
Publication PlaceNew York
2017
Pages1-5
Indexed ByEI
EI Accession number20174004233957
Contribution Rank1
ISBN978-1-5386-0346-8
KeywordAtomic Force Microscopy Nanomachining Thin Film Mechanical Properties
AbstractMechanical properties at nanoscale are crucial fators in the applications such as nanoscale interconnects and active components in electronic, optoelectronic, and electromechanical devices. Determination of the hardness of nanostructures, especially nano-thin-film, with regime from several to hundreds nanometers is a challenge. In this study, we proposed an ultrasonic vibration (USV)-assisted atomic force microscopy (AFM) method to measure the hardness of bulk materials and nano-thin-film with the thickness of 25 and hundreds nanometers. The hardness properties of material can be detected by the cantilever phase response in the USV machining process. By recording the depth-phase data, the hardness information can be extracted through fitting the data by the mathematical model. The theoretical analysis and experimental results valid the proposed method.
Language英语
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/21073
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China
2.University of Chinese Academy of Sciences, Beijing, 100049, China
Recommended Citation
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. Hardness determination at nanoscale by ultrasonic vibration-assisted AFM[C]. New York:IEEE,2017:1-5.
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