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Fabrication of bottom fillet nano-mold to increase the mold lifetime
Yin, Zhifu; Lu BL(鲁伯林); Cheng, E.; Sun, Lei; Zou, Helin
作者部门智能检测与装备研究室
关键词Numerical Simulation Pdms Nano-mold Pecvd Sinx
发表期刊Journal of Nanoscience and Nanotechnology
ISSN1533-4880
2017
卷号17期号:12页码:8975-8980
收录类别SCI ; EI
EI收录号20174004232075
WOS记录号WOS:000417111000038
产权排序2
资助机构Specialized Research Fund for the Doctoral Program of Higher Education of China (SRFDP)
摘要T-NIL (Thermal imprint lithography) is a promising technology to fabricate low-cost, high-throughput, and high resolution nano-structures in the polymer substrates. However, the foremost issues during T-NIL are the development of a low-cost and concise nano-mold fabrication method and improvement of the nano-mold lifetime. In this paper, the stress distribution in the nano-mold was studied by numerical simulation method and the fracture mechanism of the nano-mold was proposed. According to the simulation results, a fillet in the bottom of the nano-mold can significantly increase the lifetime of the nano-mold. Therefore, a top fillet SiNxnano-mold with low-cost was fabricated by SiNxdeposition method, and then the bottom fillet PDMS nano-mold with 330 nm wide and 1.3 μm deep nanochannels was replicated by casting mold method. During SiNxdeposition, the ratio of high frequency and low frequency and deposition temperature were optimized. The SiNxfilm with small compressive stress of 75.7 MPa can be deposited on the Si substrate.
语种英语
WOS类目Chemistry, Multidisciplinary ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
关键词[WOS]UV-NANOIMPRINT LITHOGRAPHY ; NANOCHANNEL FABRICATION ; NANOFLUIDIC CHANNEL ; SI-MOLD ; SILICON ; STRESS ; FILMS
WOS研究方向Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
资助项目Specialized Research Fund for the Doctoral Program of Higher Education of China (SRFDP)[20120041110034]
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/21098
专题智能检测与装备研究室
通讯作者Zou, Helin
作者单位1.School of Mechanical Science and Engineering, Jilin University, Changchun, 130012, China
2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110179, China
3.School of Mechanical Engineering, Hebei University of Technology, Tianjin, 300132, China
4.Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian, 116024, China
推荐引用方式
GB/T 7714
Yin, Zhifu,Lu BL,Cheng, E.,et al. Fabrication of bottom fillet nano-mold to increase the mold lifetime[J]. Journal of Nanoscience and Nanotechnology,2017,17(12):8975-8980.
APA Yin, Zhifu,Lu BL,Cheng, E.,Sun, Lei,&Zou, Helin.(2017).Fabrication of bottom fillet nano-mold to increase the mold lifetime.Journal of Nanoscience and Nanotechnology,17(12),8975-8980.
MLA Yin, Zhifu,et al."Fabrication of bottom fillet nano-mold to increase the mold lifetime".Journal of Nanoscience and Nanotechnology 17.12(2017):8975-8980.
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