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Submicron processing using laser-induced photonic nanojet
Wen YD(文扬东); Wang FF(王飞飞); Yu HB(于海波); Liu LQ(刘连庆); LI WJ(李文荣)
Department机器人学研究室
Conference Name17th IEEE International Conference on Nanotechnology, NANO 2017
Conference DateJuly 25-28, 2017
Conference PlacePittsburgh, PA, United states
Author of SourceIEEE Nanotechnology Council (NTC)
Source Publication2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
PublisherIEEE
Publication PlaceNew York
2017
Pages940-941
Indexed ByEI ; CPCI(ISTP)
EI Accession number20180604700428
WOS IDWOS:000434647500219
Contribution Rank1
ISBN978-1-5090-3028-6
Abstract

In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.

Language英语
Citation statistics
Document Type会议论文
Identifierhttp://ir.sia.cn/handle/173321/21545
Collection机器人学研究室
Corresponding AuthorLiu LQ(刘连庆); LI WJ(李文荣)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong, Hong Kong
Recommended Citation
GB/T 7714
Wen YD,Wang FF,Yu HB,et al. Submicron processing using laser-induced photonic nanojet[C]//IEEE Nanotechnology Council (NTC). New York:IEEE,2017:940-941.
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