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基于纳米操作机器人的超声加工与检测协同设计研究
Alternative TitleThe co-design of ultrasonic machining and sensing with nanomanipulation robot
施佳林1,2
Department机器人学研究室
Thesis Advisor刘连庆
ClassificationTP242
Keyword纳米操作机器人 原子力显微镜 超声纳米加工 加工检测 纳米器件
Call NumberTP242/S52/2018
Pages147页
Degree Discipline检测技术与自动化装置
Degree Name博士
2018-05-17
Degree Grantor中国科学院沈阳自动化研究所
Place of Conferral沈阳
Abstract本文针对基于纳米操作机器人的纳米加工技术所面临的问题和巨大挑战,结合超声辅助方法、机器人学和自动化技术,在系统地分析了基于纳米操作机器人超声加工和检测协同作业机理的基础上,重点开展了以下研究工作:(1)超声辅助纳米精细加工机理:纳米尺度下超声机械加工方法的加工机理尚不明确,缺乏能够定量化分析的实用理论模型。本文研究了在超声振动下针尖与样品间的动态加工过程,分析了加工过程样品材料和针尖的受力过程,将超声振动引发的动量引入了加工模型,提出了可以定量分析的加工模型,并开展了纳米精细加工实验,验证了提出模型的正确性。(2)加工深度与状态的实时检测与感知:目前基于纳米操作机器人的纳米加工技术仍然无法在加工过程中实时感知加工深度和加工状态。本文引入了新的物理原理,利用悬臂梁的超声相位响应对加工深度和加工状态进行实时的感知。通过大量的实验研究证明了相比于检测加工力,相位响应不受到堆积物等外界干扰因素的影响,实现了对加工深度、样品硬度的变化、和纳米薄膜的界面实时检测和感知,同时也实现了对材料纳米尺度的硬度表征。(3)加工与检测协同设计:传统的基于纳米操作机器人的纳米加工方法由于缺乏实时的加工深度和状态反馈,会导致过切割、欠切割、堆积物影响加工效果和严重的针尖磨损等问题。本文对超声纳米加工与检测进行协同设计,发展新型的加工模式,在任务空间形成了真正的闭环控制,解决了上述严重的加工问题,明显提升了纳米加工的质量。(4)二维材料纳米器件的加工与检测协同制造:电子束、离子束等加工方法对二维材料有污染和损伤、对准和套刻误差大,很难对纳米尺度的二维材料进行器件的制造。利用基于纳米操作机器人的纳米成像和加工与检测协同设计方法,实现了微纳金属结构的一体化加工制造,结合剥离工艺完成了基于纳米二维材料的电子器件制造,对二维材料电子器件尺度效应的研究和基于二维材料大规模集成电路的制造有着重要意义。本文通过理论分析、建模仿真、及实验研究,丰富了超声辅助原子力显微镜的加工机制,提高了基于纳米操作机器人的纳米加工效果和器件制造能力,为其今后的实际应用提供了理论基础和技术支持。
Other AbstractThis dissertation addresses the significant challenges faced by nanomachining method based on nanomanipulation robot. Combining the ultrasonic assisted methods, robotics, and automation technologies, this dissertation systematically analyzes the mechanism of the co-design of ultrasonic machining and detection based on the nanomanipulation robot. The following researches was carried out: (1) The Mechanism of Ultrasound-assisted Nanomachining: The mechanism of ultrasonic-assisted nanomachining methods is not yet clear, and there is a lack of practical theoretical models that can be used for quantitative analysis. This dissertation studies the dynamic machining process between the nano tip and the sample under ultrasonic vibration, analyzes the force between the sample and the tip during the machining process, introduces the momentum induced by ultrasonic vibration into the nanomachining model, proposes a nanomachining model that can be quantitatively analyzed. Nanomachining experiments were carried out to verify the correctness of the proposed model. (2) Real-time Detection and Sense of Machining Depth and Status: To date, nanomachining method based on nanomanipulation robot still lacks the real-time detection of machining depth and sense of machining state in the machining process. In this dissertation, a new physical principle is introduced, and the ultrasonic phase response of a cantilever is used to sense the machining depth and state in real time. Through a large number of experimental studies, it has been proved that the phase response is not affected by external disturbance factors such as debris accumulation, compared to the conventional force mode. The detection and sense of machining depth, materials hardness, and interface of nano thin film is achieved. The characterization of materials hardness is also realized. (3) Co-design of Ultrasonic Nanomachining and Sensing: The conventional nanomachining method based on nanomanipulation robot will result in over-cutting, under-cutting, debris affects, and severe tip wear due to the lack of real-time detection of machining depth and feedback of machining state. In this dissertation, co-design of ultrasonic nanomachining and detection is carried out, a new type of machining mode is developed, a closed-loop control is established in the task space, which solves the above-mentioned serious machining problems and significantly improves the quality of nanomachining results. (4) Manufacturing of Two-dimensional Material based Nanodevices with Machining and Sensing Co-Design Method: The electron beam, ion beam and other high energy exposure methods will pollute and damage to two-dimensional materials, and hard to align and overlay, and it is difficult to manufacture devices based on nanoscale two-dimensional materials. Using the nano imaging and the co-design of machining and sensing based on the nanomanipulation robot, the intergraded manufacturing of micro- and nano-metal structures is achieved. In combination with the lift-off process, the manufacture of electronic devices based on nano-scale two-dimensional materials is realized. It has great significance to the study the size effects and the production of large-scale integrated circuits based on two-dimensional materials. Through theoretical analysis, modeling and its simulation, and the experimental study, this dissertation enriches the nanomachining mechanism of ultrasound-assisted atomic force microscopy, improves the nanomachining effects and device manufacturing capabilities of nanomanipulation robot, and provides theoretical basis and technology support for its further and practical applications.
Language中文
Contribution Rank1
Document Type学位论文
Identifierhttp://ir.sia.cn/handle/173321/21813
Collection机器人学研究室
Affiliation1.中国科学院沈阳自动化研究所
2.中国科学院大学
Recommended Citation
GB/T 7714
施佳林. 基于纳米操作机器人的超声加工与检测协同设计研究[D]. 沈阳. 中国科学院沈阳自动化研究所,2018.
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