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The fabrication of Au nanowire by phase-control mode of USV-assisted AFM nanomachining
Shi JL(施佳林)1,2; Liu LQ(刘连庆)1; Yu P(于鹏)1; Cong Y(丛杨)1
作者部门机器人学研究室
会议名称2017 IEEE International Conference on Robotics and Biomimetics, ROBIO 2017
会议日期December 5-8, 2017
会议地点Macau, China
会议主办者Beijing Institute of Technology ; City University of Hong Kong ; IEEE Robotics and Automation Society ; Shenzhen Academy of Robotics ; University of Hong Kong ; University of Macau
会议录名称Proceedings of the 2017 IEEE International Conference on Robotics and Biomimetics
出版者IEEE
出版地New York
2017
页码1124-1129
收录类别EI
EI收录号20182905568434
产权排序1
ISBN号978-1-5386-3741-8
关键词AFM nanomachining ultrasonic vibration nanowire fabrication
摘要This paper proposed Au nanowire fabrication method combining the phase-control mode of nanomachining and the lift-off process. The conventional force-control mode of AFM nanomachining has many drawbacks such as stick-slip motion of machining, unable to directly control the machining depth, under-cutting and over-cutting. These drawbacks will lead to invalid nanopattern of resist or severe tip wear. The phase-control mode can avoid these drawbacks of conventional force-control mode. After patterning the nanogrooves by phase-control mode nanomachinng, the lift-off process is utilized to fabricate Au nanowire. Experimental result shows that width of fabricated nanowire is ∼ 50 nm. The present method also demonstrates the potential on the fabrication of three-dimension nanostructures and nanoelectronic device.
语种英语
文献类型会议论文
条目标识符http://ir.sia.cn/handle/173321/22131
专题机器人学研究室
通讯作者Liu LQ(刘连庆)
作者单位1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式
GB/T 7714
Shi JL,Liu LQ,Yu P,et al. The fabrication of Au nanowire by phase-control mode of USV-assisted AFM nanomachining[C]//Beijing Institute of Technology, City University of Hong Kong, IEEE Robotics and Automation Society, Shenzhen Academy of Robotics, University of Hong Kong, University of Macau. New York:IEEE,2017:1124-1129.
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