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Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube
Sun, Kun1; Zhang, Shiwei1; Li, Yajie1; Zhang, Zhijun1; Li, Haitao1; Mu RY(牟如意)2
作者部门装备制造技术研究室
关键词Monte Carlo Simulation Turbo Molecular Pump Inlet Tube Free Molecular Flow
发表期刊Molecular Simulation
ISSN0892-7022
2018
卷号44期号:15页码:1261-1269
收录类别SCI ; EI
EI收录号20182705390208
WOS记录号WOS:000441735700012
产权排序2
摘要

Due to the beaming effect of inlet tube and reflection effect of turbine cover in the turbo molecular pump, the positional and angular distribution of incident gas molecules (IGM) on the turbine blades would no longer be uniformly distributed. Based on the test particle Monte Caro method, a new self-defining procedure is proposed and it can be more accurate to describe the status of IGM into turbine blades. The results show that the influence of rotor speed on the transmission probability is indistinctive. Meanwhile, the incident density between the tip and root of the blades is distinct. The positional beaming effect and the angular beaming effect are enhanced with the lengthening of the tube and less molecule diverge towards the tube wall. The positive transmission probability of first-stage turbine blades using our new method is different from those obeying the cosine distribution under the same number of incident molecules. The calculation results of new method verified by another procedure are reasonable and accurate.

语种英语
WOS类目Chemistry, Physical ; Physics, Atomic, Molecular & Chemical
关键词[WOS]STAGE TURBOMOLECULAR PUMP ; SINGLE-STAGE ; ANGULAR-DISTRIBUTION ; DESIGN ; OPERATION ; SPEED ; MODEL
WOS研究方向Chemistry ; Physics
引用统计
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/22137
专题装备制造技术研究室
作者单位1.School of Mechanical Engineering & Automation, Northeastern University, Shenyang, China
2.Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, China
推荐引用方式
GB/T 7714
Sun, Kun,Zhang, Shiwei,Li, Yajie,等. Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube[J]. Molecular Simulation,2018,44(15):1261-1269.
APA Sun, Kun,Zhang, Shiwei,Li, Yajie,Zhang, Zhijun,Li, Haitao,&Mu RY.(2018).Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube.Molecular Simulation,44(15),1261-1269.
MLA Sun, Kun,et al."Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube".Molecular Simulation 44.15(2018):1261-1269.
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