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Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube
Sun, Kun1; Zhang, Shiwei1; Li, Yajie1; Zhang, Zhijun1; Li, Haitao1; Mu RY(牟如意)2
Department装备制造技术研究室
Source PublicationMolecular Simulation
ISSN0892-7022
2018
Volume44Issue:15Pages:1261-1269
Indexed BySCI ; EI
EI Accession number20182705390208
WOS IDWOS:000441735700012
Contribution Rank2
KeywordMonte Carlo Simulation Turbo Molecular Pump Inlet Tube Free Molecular Flow
Abstract

Due to the beaming effect of inlet tube and reflection effect of turbine cover in the turbo molecular pump, the positional and angular distribution of incident gas molecules (IGM) on the turbine blades would no longer be uniformly distributed. Based on the test particle Monte Caro method, a new self-defining procedure is proposed and it can be more accurate to describe the status of IGM into turbine blades. The results show that the influence of rotor speed on the transmission probability is indistinctive. Meanwhile, the incident density between the tip and root of the blades is distinct. The positional beaming effect and the angular beaming effect are enhanced with the lengthening of the tube and less molecule diverge towards the tube wall. The positive transmission probability of first-stage turbine blades using our new method is different from those obeying the cosine distribution under the same number of incident molecules. The calculation results of new method verified by another procedure are reasonable and accurate.

Language英语
WOS SubjectChemistry, Physical ; Physics, Atomic, Molecular & Chemical
WOS KeywordSTAGE TURBOMOLECULAR PUMP ; SINGLE-STAGE ; ANGULAR-DISTRIBUTION ; DESIGN ; OPERATION ; SPEED ; MODEL
WOS Research AreaChemistry ; Physics
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/22137
Collection智能产线与系统研究室
Affiliation1.School of Mechanical Engineering & Automation, Northeastern University, Shenyang, China
2.Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, China
Recommended Citation
GB/T 7714
Sun, Kun,Zhang, Shiwei,Li, Yajie,等. Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube[J]. Molecular Simulation,2018,44(15):1261-1269.
APA Sun, Kun,Zhang, Shiwei,Li, Yajie,Zhang, Zhijun,Li, Haitao,&Mu RY.(2018).Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube.Molecular Simulation,44(15),1261-1269.
MLA Sun, Kun,et al."Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube".Molecular Simulation 44.15(2018):1261-1269.
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