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AFM Tip Position Control in situ for Effective Nano-Manipulation
Yuan S(袁帅)1,2,3; Wang ZD(王志东)4; Xi N(席宁)5; Wang YC(王越超)1; Liu LQ(刘连庆)1
作者部门机器人学研究室
关键词AFM based Nano-manipulation AFM Tip Localization Stochastic Calibration Kalman Filter
发表期刊IEEE/ASME Transactions on Mechatronics
ISSN1083-4435
2018
收录类别EI
EI收录号20183705794669
产权排序1
资助机构National Natural Science Foundation of China (Project Codes: 61305125, 61522312, 61433017, 91748212), National Post Doctor Foundation (Project Codes: 2013M530955, 2014T70265)), Universities basic Scientific Research Project (LJZ 2017020) and Chinese Academy of Sciences State Foreign Expert Bureau International Partnership Program for Creative Research Teams.
摘要The spatial uncertainties of atomic force microscope (AFM) tip position hinder the development of the AFM based nano-manipulation. These uncertainties cannot be corrected at nanoscale using the traditional position sensor, which is used in the macro robot localization. As for that problem, we propose that the AFM tip is used as the sensor to detect the landmark in the sample surface via a local-scan based motion. The landmark positions are used to estimate the tip position in the task frame. The local-scan based observation model is built on the foundation of the tip motion model. These model parameters are calibrated using statistical experiments. Simulation and experimental results show that the proposed method can improve the accuracy of the tip position. Then the influence of the tip position accuracy is analyzed by using nano-manipulation results of the experiments. Furtherly, three important factors in AFM tip based nano-manipulation are discussed. The landmark domain as the first factor is analyzed for assurance of the tip accuracy before nano-manipulation. The second one is studying the contact characteristics between the nanoparticle and the substrate by detecting nano-manipulation force. The last one is taking the tip shape into account for effective manipulation through fine tuning the tip offset. Finally, the experimental results illustrate the effectiveness of the proposed method for fabricating the nano-structures and devices.
语种英语
文献类型期刊论文
条目标识符http://ir.sia.cn/handle/173321/22773
专题机器人学研究室
通讯作者Yuan S(袁帅)
作者单位1.State Key Laboratory of Robotics in Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning Province 110016, China
2.Information and control engineering faculty, Shenyang Jianzhu University, 47826 Shenyang, Liaoning China 110168
3.Graduate school of Chinese Academy of Sciences, Beijing 100001, China
4.Department of Advanced Robotics, Chiba Institute of Technology, Chiba, 275-0016, JAPAN
5.Department of Industrial and Manufacturing Systems Engineering, Emerging Technologies Institute, in Faculty of Engineering, University of Hong Kong, Pokfulam Road, HongKong
推荐引用方式
GB/T 7714
Yuan S,Wang ZD,Xi N,et al. AFM Tip Position Control in situ for Effective Nano-Manipulation[J]. IEEE/ASME Transactions on Mechatronics,2018.
APA Yuan S,Wang ZD,Xi N,Wang YC,&Liu LQ.(2018).AFM Tip Position Control in situ for Effective Nano-Manipulation.IEEE/ASME Transactions on Mechatronics.
MLA Yuan S,et al."AFM Tip Position Control in situ for Effective Nano-Manipulation".IEEE/ASME Transactions on Mechatronics (2018).
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