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AFM Tip Position Control in situ for Effective Nano-Manipulation
Yuan S(袁帅)1,2,3; Wang ZD(王志东)4; Xi N(席宁)5; Wang YC(王越超)1; Liu LQ(刘连庆)1
Department机器人学研究室
Source PublicationIEEE/ASME Transactions on Mechatronics
ISSN1083-4435
2018
Volume23Issue:6Pages:2825-2836
Indexed BySCI ; EI
EI Accession number20183705794669
WOS IDWOS:000453560200029
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China ; National Post Doctor Foundation ; Universities basic Scientific Research Project ; Chinese Academy of Sciences State Foreign Expert Bureau International Partnership Program for Creative Research Teams
KeywordAfm Based Nano-manipulation Afm Tip Localization Stochastic Calibration Kalman Filter
Abstract

The spatial uncertainties of atomic force microscope (AFM) tip position hinder the development of the AFM based nano-manipulation. These uncertainties cannot be corrected at nanoscale using the traditional position sensor, which is used in the macro robot localization. As for that problem, we propose that the AFM tip is used as the sensor to detect the landmark in the sample surface via a local-scan based motion. The landmark positions are used to estimate the tip position in the task frame. The local-scan based observation model is built on the foundation of the tip motion model. These model parameters are calibrated using statistical experiments. Simulation and experimental results show that the proposed method can improve the accuracy of the tip position. Then the influence of the tip position accuracy is analyzed by using nano-manipulation results of the experiments. Furtherly, three important factors in AFM tip based nano-manipulation are discussed. The landmark domain as the first factor is analyzed for assurance of the tip accuracy before nano-manipulation. The second one is studying the contact characteristics between the nanoparticle and the substrate by detecting nano-manipulation force. The last one is taking the tip shape into account for effective manipulation through fine tuning the tip offset. Finally, the experimental results illustrate the effectiveness of the proposed method for fabricating the nano-structures and devices.

Language英语
WOS SubjectAutomation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS KeywordATOMIC-FORCE MICROSCOPY ; DRIFT COMPENSATION ; HYSTERESIS
WOS Research AreaAutomation & Control Systems ; Engineering
Funding ProjectChinese Academy of Sciences State Foreign Expert Bureau International Partnership Program for Creative Research Teams ; Universities basic Scientific Research Project[LJZ 2017020] ; National Post Doctor Foundation[2014T70265] ; National Post Doctor Foundation[2013M530955] ; National Natural Science Foundation of China[91748212] ; National Natural Science Foundation of China[61433017] ; National Natural Science Foundation of China[61522312] ; National Natural Science Foundation of China[61305125] ; National Natural Science Foundation of China[61305125] ; National Natural Science Foundation of China[61522312] ; National Natural Science Foundation of China[61433017] ; National Natural Science Foundation of China[91748212] ; National Post Doctor Foundation[2013M530955] ; National Post Doctor Foundation[2014T70265] ; Universities basic Scientific Research Project[LJZ 2017020] ; Chinese Academy of Sciences State Foreign Expert Bureau International Partnership Program for Creative Research Teams
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/22773
Collection机器人学研究室
Corresponding AuthorYuan S(袁帅)
Affiliation1.State Key Laboratory of Robotics in Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning Province 110016, China
2.Information and control engineering faculty, Shenyang Jianzhu University, 47826 Shenyang, Liaoning China 110168
3.Graduate school of Chinese Academy of Sciences, Beijing 100001, China
4.Department of Advanced Robotics, Chiba Institute of Technology, Chiba, 275-0016, JAPAN
5.Department of Industrial and Manufacturing Systems Engineering, Emerging Technologies Institute, in Faculty of Engineering, University of Hong Kong, Pokfulam Road, HongKong
Recommended Citation
GB/T 7714
Yuan S,Wang ZD,Xi N,et al. AFM Tip Position Control in situ for Effective Nano-Manipulation[J]. IEEE/ASME Transactions on Mechatronics,2018,23(6):2825-2836.
APA Yuan S,Wang ZD,Xi N,Wang YC,&Liu LQ.(2018).AFM Tip Position Control in situ for Effective Nano-Manipulation.IEEE/ASME Transactions on Mechatronics,23(6),2825-2836.
MLA Yuan S,et al."AFM Tip Position Control in situ for Effective Nano-Manipulation".IEEE/ASME Transactions on Mechatronics 23.6(2018):2825-2836.
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