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激光诱导击穿光谱微区分析的研究应用进展
Alternative TitleProgress in Research and Application of Micro-laser-induced Breakdown Spectroscopy
孙兰香1,2,3; 汪为1,2,3,4; 田雪咏5; 张鹏1,2,3,4; 齐立峰1,2,3; 郑黎明1,2,3
Department工业控制网络与系统研究室
Source Publication分析化学
ISSN0253-3820
2018
Volume46Issue:10Pages:1518-1527
Indexed ByCSCD
CSCD IDCSCD:6344435
Contribution Rank1
Funding Organization国家重点研发计划项目(2017YFF0106202) ; 国家自然科学基金项目(61473279) ; 中国科学院前沿科学重点研究计划项目(QYZDJ-SSW-JSC037) ; 中国科学院青年创新促进会项目
Keyword激光诱导击穿光谱 微区分析 烧蚀弹坑 偏析 评述
Abstract

激光诱导击穿光谱微区分析通常是指利用紧聚焦激光束在微米尺度范围对样品表面进行分析的技术。相比于常规激光诱导击穿光谱分析,微区分析可以在更小范围、更少样品的情况下提供更加被分析样品丰富的形态、结构、含量信息,因而应用领域广泛。本文介绍了激光诱导击穿光谱微区分析在激光源选择以及光路系统结构方面的应用状况,综述了其在金属、半导体、动植物等领域的应用研究进展,讨论了目前存在的问题,对发展前景和发展方向进行了展望。

Other Abstract

The technique of micro-laser-induced breakdown spectroscopy usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to macrolaser- induced breakdown spectroscopy,it can provide more abundant form,structure,and content information in a smaller,less sample condition. Hence,the application field is very wide. In this paper,the basic status of micro-laser-induced breakdown spectroscopy in the selection of laser source and the structure of optical path system were introduced,and its application in metal,semiconductor,animal and plant fields was reviewed. The existing issues and potential development direction were also pointed out.

Language中文
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/23340
Collection工业控制网络与系统研究室
Corresponding Author孙兰香
Affiliation1.中国科学院沈阳自动化研究所
2.中国科学院机器人与智能制造创新研究院
3.中国科学院网络化控制系统重点实验室
4.中国科学院大学
5.新松机器人自动化股份有限公司中央研究院
Recommended Citation
GB/T 7714
孙兰香,汪为,田雪咏,等. 激光诱导击穿光谱微区分析的研究应用进展[J]. 分析化学,2018,46(10):1518-1527.
APA 孙兰香,汪为,田雪咏,张鹏,齐立峰,&郑黎明.(2018).激光诱导击穿光谱微区分析的研究应用进展.分析化学,46(10),1518-1527.
MLA 孙兰香,et al."激光诱导击穿光谱微区分析的研究应用进展".分析化学 46.10(2018):1518-1527.
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